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Liu, Lihua, Wang, Yuxin, Feng, Kecheng, Li, Yingai, Li, Weiqing, Zhao, Chunhong, Zhao, Yongnian (2006) Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering. Applied Surface Science, 252. 4185-4189 doi:10.1016/j.apsusc.2005.06.025

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Reference TypeJournal (article/letter/editorial)
TitlePreparation of boron carbon nitride thin films by radio frequency magnetron sputtering
JournalApplied Surface Science
AuthorsLiu, LihuaAuthor
Wang, YuxinAuthor
Feng, KechengAuthor
Li, YingaiAuthor
Li, WeiqingAuthor
Zhao, ChunhongAuthor
Zhao, YongnianAuthor
Year2006 (April)Volume252
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2005.06.025Search in ResearchGate
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Mindat Ref. ID9908020Long-form Identifiermindat:1:5:9908020:8
GUID0
Full ReferenceLiu, Lihua, Wang, Yuxin, Feng, Kecheng, Li, Yingai, Li, Weiqing, Zhao, Chunhong, Zhao, Yongnian (2006) Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering. Applied Surface Science, 252. 4185-4189 doi:10.1016/j.apsusc.2005.06.025
Plain TextLiu, Lihua, Wang, Yuxin, Feng, Kecheng, Li, Yingai, Li, Weiqing, Zhao, Chunhong, Zhao, Yongnian (2006) Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering. Applied Surface Science, 252. 4185-4189 doi:10.1016/j.apsusc.2005.06.025
In(n.d.) Applied Surface Science Vol. 252. Elsevier BV

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Liu, Lihua, Wang, Yuxin, Feng, Kecheng, Li, Yingai, Li, Weiqing, Zhao, Chunhong, Zhao, Yongnian (2007) Reply by Liu et al. Applied Surface Science, 253. 4816-4817 doi:10.1016/j.apsusc.2006.10.035
Linss, V. (2007) Comment on Lihua Liu et al. “Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering” [Appl. Surf. Sci. 252 (2006) 4185–4189]. Applied Surface Science, 253. 4814-4815 doi:10.1016/j.apsusc.2006.10.034
Li, Weiqing, Gu, Guangrui, Li, Yingai, He, Zhi, Feng, Wei, Liu, Lihua, Zhao, Chunhong, Zhao, Yongnian (2005) Influence of heat treatment on field emission characteristics of boron nitride thin films. Applied Surface Science, 239. 432-436 doi:10.1016/j.apsusc.2004.06.009
Liu, Lihua, Zhao, Yongnian, Tao, Yanchun, Yang, Dapeng, Ma, Hongmei, Li, Yingai (2006) Effects of experimental parameters on composition of boron carbon nitride thin films deposited by magnetron sputtering. Applied Surface Science, 253. 439-443 doi:10.1016/j.apsusc.2005.12.079
Li, Weiqing, Gu, Guangrui, Li, Yingai, He, Zhi, Liu, Lihua, Zhao, Chunhong, Zhao, Yongnian (2005) Influence of hydrogen and oxygen plasma treatment on field emission characteristics of boron nitride thin films. Applied Surface Science, 242. 207-211 doi:10.1016/j.apsusc.2004.08.016
Li, W.L., Fei, W.D., Hanabusa, T. (2006) Effect of deposition condition on residual stress of iron nitride thin films prepared by magnetron sputtering and ion implantation. Applied Surface Science, 252. 2847-2852 doi:10.1016/j.apsusc.2005.04.043
Zhang, C.G., Chen, W.D., Bian, L.F., Song, S.F., Hsu, C.C. (2006) Preparation and characterization of GaN films by radio frequency magnetron sputtering and carbonized-reaction technique. Applied Surface Science, 252. 2153-2158 doi:10.1016/j.apsusc.2005.03.209
Feng, Liping, Liu, Zhengtang, Li, Qiang, Song, Wenyan (2006) Investigation of SiO2/Si3N4 films prepared on sapphire by r.f. magnetron reactive sputtering. Applied Surface Science, 252. 4064-4070 doi:10.1016/j.apsusc.2005.06.021
Wu, Yanping, Zhu, Shengfa, Liu, Tianwei, Li, Fangfang, Zhang, Yanzhi, Rao, Yongchu, Zhang, Yongbin (2014) Preparation and properties of erbium oxide films deposited by radio frequency magnetron sputtering. Applied Surface Science, 307. 615-620 doi:10.1016/j.apsusc.2014.04.086
Yuan, Longyan, Fang, Guojia, Li, Chun, Wang, Mingjun, Liu, Nishuang, Ai, Lei, Cheng, Yanzhao, Gao, Huimin, Zhao, Xingzhong (2007) Influence of N2 flow ratio on the properties of hafnium nitride thin films prepared by DC magnetron sputtering. Applied Surface Science, 253. 8538-8542 doi:10.1016/j.apsusc.2007.04.024
Dong, Yunshan, Liu, Yan, Dai, Jiawei, Li, Geyang (2006) Superhard Nb–Si–N composite films synthesized by reactive magnetron sputtering. Applied Surface Science, 252. 5215-5219 doi:10.1016/j.apsusc.2005.08.007
 
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