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Ghulinyan, M., Bernard, M., Bartali, R., Pucker, G. (2015) Formation of Mach angle profiles during wet etching of silica and silicon nitride materials. Applied Surface Science, 359. 679-686 doi:10.1016/j.apsusc.2015.10.114

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Reference TypeJournal (article/letter/editorial)
TitleFormation of Mach angle profiles during wet etching of silica and silicon nitride materials
JournalApplied Surface Science
AuthorsGhulinyan, M.Author
Bernard, M.Author
Bartali, R.Author
Pucker, G.Author
Year2015 (December)Volume359
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2015.10.114Search in ResearchGate
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Mindat Ref. ID9927077Long-form Identifiermindat:1:5:9927077:7
GUID0
Full ReferenceGhulinyan, M., Bernard, M., Bartali, R., Pucker, G. (2015) Formation of Mach angle profiles during wet etching of silica and silicon nitride materials. Applied Surface Science, 359. 679-686 doi:10.1016/j.apsusc.2015.10.114
Plain TextGhulinyan, M., Bernard, M., Bartali, R., Pucker, G. (2015) Formation of Mach angle profiles during wet etching of silica and silicon nitride materials. Applied Surface Science, 359. 679-686 doi:10.1016/j.apsusc.2015.10.114
In(n.d.) Applied Surface Science Vol. 359. Elsevier BV

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