Zhou, Jiakai, Niu, Xinhuan, Cui, Yaqi, Wang, Zhi, Wang, Jianchao, Wang, Ru (2020) Study on the film forming mechanism, corrosion inhibition effect and synergistic action of two different inhibitors on copper surface chemical mechanical polishing for GLSI. Applied Surface Science, 505. 144507pp. doi:10.1016/j.apsusc.2019.144507
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Study on the film forming mechanism, corrosion inhibition effect and synergistic action of two different inhibitors on copper surface chemical mechanical polishing for GLSI | ||
| Journal | Applied Surface Science | ||
| Authors | Zhou, Jiakai | Author | |
| Niu, Xinhuan | Author | ||
| Cui, Yaqi | Author | ||
| Wang, Zhi | Author | ||
| Wang, Jianchao | Author | ||
| Wang, Ru | Author | ||
| Year | 2020 (March) | Volume | 505 |
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/j.apsusc.2019.144507Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 9940256 | Long-form Identifier | mindat:1:5:9940256:1 |
| GUID | 0 | ||
| Full Reference | Zhou, Jiakai, Niu, Xinhuan, Cui, Yaqi, Wang, Zhi, Wang, Jianchao, Wang, Ru (2020) Study on the film forming mechanism, corrosion inhibition effect and synergistic action of two different inhibitors on copper surface chemical mechanical polishing for GLSI. Applied Surface Science, 505. 144507pp. doi:10.1016/j.apsusc.2019.144507 | ||
| Plain Text | Zhou, Jiakai, Niu, Xinhuan, Cui, Yaqi, Wang, Zhi, Wang, Jianchao, Wang, Ru (2020) Study on the film forming mechanism, corrosion inhibition effect and synergistic action of two different inhibitors on copper surface chemical mechanical polishing for GLSI. Applied Surface Science, 505. 144507pp. doi:10.1016/j.apsusc.2019.144507 | ||
| In | (n.d.) Applied Surface Science Vol. 505. Elsevier BV | ||
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