Reference Type | Journal (article/letter/editorial) |
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Title | LPCVD amorphous silicon carbide films, properties and microelectronics applications |
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Journal | Le Journal de Physique IV |
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Authors | Kleps, I. | Author |
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Angelescu, A. | Author |
Year | 1999 (September) | Volume | 9 |
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Publisher | EDP Sciences |
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DOI | doi:10.1051/jp4:19998139Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 10301023 | Long-form Identifier | mindat:1:5:10301023:8 |
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GUID | 0 |
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Full Reference | Kleps, I., Angelescu, A. (1999) LPCVD amorphous silicon carbide films, properties and microelectronics applications. Le Journal de Physique IV, 9. doi:10.1051/jp4:19998139 |
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Plain Text | Kleps, I., Angelescu, A. (1999) LPCVD amorphous silicon carbide films, properties and microelectronics applications. Le Journal de Physique IV, 9. doi:10.1051/jp4:19998139 |
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In | (n.d.) Le Journal de Physique IV Vol. 9. EDP Sciences |
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