Reference Type | Journal (article/letter/editorial) |
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Title | Synchrotron Radiation-Assisted Removal of Oxygen and Carbon Contaminants from a Silicon Surface |
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Journal | Japanese Journal of Applied Physics |
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Authors | Nara, Yasuo | Author |
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Sugita, Yoshihiro | Author |
Nakayama, Noriaki | Author |
Ito, Takashi | Author |
Year | 1991 (October 1) | Volume | 30 |
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Publisher | Japan Society of Applied Physics |
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DOI | doi:10.1143/jjap.30.l1753Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 14996885 | Long-form Identifier | mindat:1:5:14996885:2 |
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GUID | 0 |
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Full Reference | Nara, Yasuo, Sugita, Yoshihiro, Nakayama, Noriaki, Ito, Takashi (1991) Synchrotron Radiation-Assisted Removal of Oxygen and Carbon Contaminants from a Silicon Surface. Japanese Journal of Applied Physics, 30. doi:10.1143/jjap.30.l1753 |
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Plain Text | Nara, Yasuo, Sugita, Yoshihiro, Nakayama, Noriaki, Ito, Takashi (1991) Synchrotron Radiation-Assisted Removal of Oxygen and Carbon Contaminants from a Silicon Surface. Japanese Journal of Applied Physics, 30. doi:10.1143/jjap.30.l1753 |
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In | (1991) Japanese Journal of Applied Physics Vol. 30. Japan Society of Applied Physics |
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