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Kimura, Takashi, Kasugai, Hiroki (2012) Properties of Inductively Coupled Radio Frequency CH4/H2Plasmas: Experiments and Global Model. Japanese Journal of Applied Physics, 51 (4) 46202 doi:10.7567/jjap.51.046202

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Reference TypeJournal (article/letter/editorial)
TitleProperties of Inductively Coupled Radio Frequency CH4/H2Plasmas: Experiments and Global Model
JournalJapanese Journal of Applied Physics
AuthorsKimura, TakashiAuthor
Kasugai, HirokiAuthor
Year2012 (April 1)Volume51
Issue4
PublisherJapan Society of Applied Physics
DOIdoi:10.7567/jjap.51.046202Search in ResearchGate
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Mindat Ref. ID15042504Long-form Identifiermindat:1:5:15042504:7
GUID0
Full ReferenceKimura, Takashi, Kasugai, Hiroki (2012) Properties of Inductively Coupled Radio Frequency CH4/H2Plasmas: Experiments and Global Model. Japanese Journal of Applied Physics, 51 (4) 46202 doi:10.7567/jjap.51.046202
Plain TextKimura, Takashi, Kasugai, Hiroki (2012) Properties of Inductively Coupled Radio Frequency CH4/H2Plasmas: Experiments and Global Model. Japanese Journal of Applied Physics, 51 (4) 46202 doi:10.7567/jjap.51.046202
In(2012, April) Japanese Journal of Applied Physics Vol. 51 (4) Japan Society of Applied Physics

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Kimura, Takashi, Kasugai, Hiroki (2012) Properties of Inductively Coupled Radio Frequency CH$_{4}$/H$_{2}$ Plasmas: Experiments and Global Model. Japanese Journal of Applied Physics, 51. 46202 doi:10.1143/jjap.51.046202
Kimura, Takashi, Kasugai, Hiroki (2010) Experiments and global model of inductively coupled rf Ar/N2 discharges. Journal of Applied Physics, 108 (3). 33305pp. doi:10.1063/1.3468603
Kimura, Takashi, Kasugai, Hiroki (2010) Properties of inductively coupled rf Ar/H2 plasmas: Experiment and global model. Journal of Applied Physics, 107 (8). 83308pp. doi:10.1063/1.3345084
Kimura, Takashi, Hanaki, Katsuyuki (2008) Experiments and Global Model Analysis of Inductively Coupled CF4/O2/Ar Plasmas. Japanese Journal of Applied Physics, 47 (11) 8537-8545 doi:10.1143/jjap.47.8537
Takenaka, Koshi, Shibayama, Takashi, Kasugai, Daiki, Shimizu, Takeshi (2012) Giant Field-Induced Distortion in Mn3SbN at Room Temperature. Japanese Journal of Applied Physics, 51 (4) 43001 doi:10.7567/jjap.51.043001
Kimura, Takashi, Tanahashi, Hiroki (2010) Comparison of Properties of Atmospheric-Pressure Radio Frequency He/SF6/O2and He/CF4/O2Discharges. Japanese Journal of Applied Physics, 49 (2) 26102 doi:10.1143/jjap.49.026102
Miyake, Masatoshi, Yokogawa, Ken'etsu (2012) High-Temperature Annealing by Subatmospheric-Pressure Radio-Frequency Capacitively Coupled Plasma. Japanese Journal of Applied Physics, 51 (8) 8 doi:10.7567/jjap.51.08hb03
Suzuki, Atsushi, Asahina, Shuichi (2012) Quartz Sensor Measurement for N2–H2Plasmas. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.7567/jjap.51.01aa03
Denpoh, Kazuki (2012) Particle-in-Cell/Monte Carlo Collision Simulations of Striations in Inductively Coupled Plasmas. Japanese Journal of Applied Physics, 51 (10) 106202 doi:10.7567/jjap.51.106202
Kimura, Takashi, Noto, Masahisa (2006) Experimental study and global model of inductively coupled CF4∕O2 discharges. Journal of Applied Physics, 100 (6). 63303pp. doi:10.1063/1.2345461
Hiasa, Takumi, Kimura, Kenjiro, Onishi, Hiroshi (2012) Minitips in Frequency-Modulation Atomic Force Microscopy at Liquid–Solid Interfaces. Japanese Journal of Applied Physics, 51 (2) 25703 doi:10.7567/jjap.51.025703
 
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