| Reference Type | Journal (article/letter/editorial) |
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| Title | Theoretical Analysis on Mechanical Deformation of Membrane-Based Photomask Blanks |
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| Journal | Japanese Journal of Applied Physics |
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| Authors | Marumoto, Kenji | Author |
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| Aya, Sunao | Author |
| Yabe, Hedeki | Author |
| Okada, Tatsunori | Author |
| Sumitani, Hiroaki | Author |
| Year | 2012 (April 1) | Volume | 51 |
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| Issue | 4 |
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| Publisher | Japan Society of Applied Physics |
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| DOI | doi:10.7567/jjap.51.046505Search in ResearchGate |
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| Generate Citation Formats |
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| Mindat Ref. ID | 15042511 | Long-form Identifier | mindat:1:5:15042511:5 |
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| GUID | 0 |
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| Full Reference | Marumoto, Kenji, Aya, Sunao, Yabe, Hedeki, Okada, Tatsunori, Sumitani, Hiroaki (2012) Theoretical Analysis on Mechanical Deformation of Membrane-Based Photomask Blanks. Japanese Journal of Applied Physics, 51 (4) 46505 doi:10.7567/jjap.51.046505 |
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| Plain Text | Marumoto, Kenji, Aya, Sunao, Yabe, Hedeki, Okada, Tatsunori, Sumitani, Hiroaki (2012) Theoretical Analysis on Mechanical Deformation of Membrane-Based Photomask Blanks. Japanese Journal of Applied Physics, 51 (4) 46505 doi:10.7567/jjap.51.046505 |
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| In | (2012, April) Japanese Journal of Applied Physics Vol. 51 (4) Japan Society of Applied Physics |
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