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Niebelschütz, F., Cimalla, V., Tonisch, K., Haupt, Ch., Brückner, K., Stephan, R., Hein, M., Ambacher, O. (2008) AlGaN/GaN-based MEMS with two-dimensional electron gas for novel sensor applications. physica status solidi (c), 5 (6). 1914-1916 doi:10.1002/pssc.200778424

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Reference TypeJournal (article/letter/editorial)
TitleAlGaN/GaN-based MEMS with two-dimensional electron gas for novel sensor applications
Journalphysica status solidi (c)
AuthorsNiebelschütz, F.Author
Cimalla, V.Author
Tonisch, K.Author
Haupt, Ch.Author
Brückner, K.Author
Stephan, R.Author
Hein, M.Author
Ambacher, O.Author
Year2008 (May)Volume5
Issue6
PublisherWiley
DOIdoi:10.1002/pssc.200778424Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5116041Long-form Identifiermindat:1:5:5116041:4
GUID0
Full ReferenceNiebelschütz, F., Cimalla, V., Tonisch, K., Haupt, Ch., Brückner, K., Stephan, R., Hein, M., Ambacher, O. (2008) AlGaN/GaN-based MEMS with two-dimensional electron gas for novel sensor applications. physica status solidi (c), 5 (6). 1914-1916 doi:10.1002/pssc.200778424
Plain TextNiebelschütz, F., Cimalla, V., Tonisch, K., Haupt, Ch., Brückner, K., Stephan, R., Hein, M., Ambacher, O. (2008) AlGaN/GaN-based MEMS with two-dimensional electron gas for novel sensor applications. physica status solidi (c), 5 (6). 1914-1916 doi:10.1002/pssc.200778424
In(2008, May) physica status solidi (c) Vol. 5 (6) Wiley

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Tonisch, K., Buchheim, C., Niebelschütz, F., Donahue, M., Goldhahn, R., Cimalla, V., Ambacher, O. (2008) Piezoelectric actuation of all-nitride MEMS. physica status solidi (c), 5 (6). 1910-1913 doi:10.1002/pssc.200778423
Niebelschuetz, F., Brueckner, K., Tonisch, K., Stephan, R., Cimalla, V., Ambacher, O., Hein, M. A. (2010) Piezoelectric actuated epitaxially grown AlGaN/GaN-resonators. physica status solidi (c), 7 (7). 1829-1831 doi:10.1002/pssc.200983616
Brueckner, K., Niebelschuetz, F., Tonisch, K., Michael, S., Dadgar, A., Krost, A., Cimalla, V., Ambacher, O., Stephan, R., Hein, M. A. (2008) Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonators. Applied Physics Letters, 93 (17). 173504pp. doi:10.1063/1.3002296
Tonisch, K., Cimalla, V., Niebelschütz, F., Romanus, H., Eickhoff, M., Ambacher, O. (2007) Fully unstrained GaN on sacrificial AlN layers by nano-heteroepitaxy. physica status solidi (c), 4 (7). 2248-2251 doi:10.1002/pssc.200674813
Brueckner, K., Niebelschuetz, F., Tonisch, K., Foerster, Ch., Cimalla, V., Stephan, R., Pezoldt, J., Stauden, T., Ambacher, O., Hein, M. A. (2011) Micro- and nano-electromechanical resonators based on SiC and group III-nitrides for sensor applications. physica status solidi (a), 208 (2). 357-376 doi:10.1002/pssa.201026343
Tonisch, K., Cimalla, V., Foerster, Ch., Dontsov, D., Ambacher, O. (2006) Piezoelectric properties of thin AlN layers for MEMS application determined by piezoresponse force microscopy. physica status solidi (c), 3 (6). 2274-2277 doi:10.1002/pssc.200565123
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