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Kilner, J.A., Chater, R.J., Hemment, P.L.F., Peart, R.F., Maydell-Ondrusz, E.A., Taylor, M.R., Arrowsmith, R.P. (1985) SIMS and 18O tracer studies of the redistribution of oxygen in buried SiO 2 layers formed by high dose implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 293-298 doi:10.1016/0168-583x(85)90568-3

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Reference TypeJournal (article/letter/editorial)
TitleSIMS and 18O tracer studies of the redistribution of oxygen in buried SiO 2 layers formed by high dose implantation
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsKilner, J.A.Author
Chater, R.J.Author
Hemment, P.L.F.Author
Peart, R.F.Author
Maydell-Ondrusz, E.A.Author
Taylor, M.R.Author
Arrowsmith, R.P.Author
Year1985 (March)Volume7
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(85)90568-3Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5584029Long-form Identifiermindat:1:5:5584029:9
GUID0
Full ReferenceKilner, J.A., Chater, R.J., Hemment, P.L.F., Peart, R.F., Maydell-Ondrusz, E.A., Taylor, M.R., Arrowsmith, R.P. (1985) SIMS and 18O tracer studies of the redistribution of oxygen in buried SiO 2 layers formed by high dose implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 293-298 doi:10.1016/0168-583x(85)90568-3
Plain TextKilner, J.A., Chater, R.J., Hemment, P.L.F., Peart, R.F., Maydell-Ondrusz, E.A., Taylor, M.R., Arrowsmith, R.P. (1985) SIMS and 18O tracer studies of the redistribution of oxygen in buried SiO 2 layers formed by high dose implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 293-298 doi:10.1016/0168-583x(85)90568-3
In(1985) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 7. Elsevier BV

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Kilner, J.A., Chater, R.J., Hemment, P.L.F., Peart, R.F., Reeson, K.J., Arrowsmith, R.P., Davis, J.R. (1986) SIMS analysis of buried silicon nitride layers formed by high dose implantation of 14N and 15N. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 15 (1). 214-217 doi:10.1016/0168-583x(86)90288-0
Hemment, P.L.F., Peart, R.F., Yao, M.F., Stephens, K.G., Arrowsmith, R.P., Chater, R.J., Kilner, J.A. (1985) Silicon on insulator structures formed by the implantation of high doses of reactive ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 292-297 doi:10.1016/0168-583x(85)90648-2
Chater, R.J., Kilner, J.A., Reeson, K.J., Robinson, A.K., Hemment, P.L.F. (1990) 18O isotope studies on the redistribution of oxygen in noncontinuous buried layers formed by high-dose oxygen ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 45 (1). 110-114 doi:10.1016/0168-583x(90)90796-w
Kilner, J.A., Chater, R.J., Reeson, K.J., Hemment, P.L.F., Davis, J.R. (1989) Nitrogen-15 isotope tracer studies of buried nitride layer formation by high dose implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 225-229 doi:10.1016/0168-583x(89)90776-3
Chater, R.J., Kilner, J.A., Hemment, P.L.F., Reeson, K.J., Davis, J.R. (1987) The evolution of the Si/SiO2 interface in buried oxide layers formed by high dose oxygen implantation into silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 290-293 doi:10.1016/s0168-583x(87)80059-9
Chater, R.J., Kilner, J.A., Reeson, K.J., Robinson, A.K., Hemment, P.L.F. (1991) High-dose oxygen implantation into silica. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 686-690 doi:10.1016/0168-583x(91)96258-m
Lin, C., Kilner, J.A., Chater, R.J., Li, J., Nejim, A., Zhang, J.P., Hemment, P.L.F. (1993) Investigation of buried AlN layers formed by nitrogen implantation into Al. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 80. 323-326 doi:10.1016/0168-583x(93)96133-w
Griffin, C.J., Kilner, J.A., Chater, R.J., Staton-Bevan, A., Reeson, K.J., Hemment, P.L.F., Davis, J.R. (1989) A SIMS and TEM analysis of the growth mechanisms of annealed buried SiO2 layers formed by incremental high-dose oxygen Ion implantation into silicon at 150 keV. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 215-219 doi:10.1016/0168-583x(89)90774-x
Hemment, P.L.F., Reeson, K.J., Robinson, A.K., Kilner, J.A., Chater, R.J., Marsh, C.D., Christensen, K.N., Davis, J.R. (1989) Nonplanar and noncontinuous buried layers of SiO2 in silicon formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 766-769 doi:10.1016/0168-583x(89)90294-2
Kilner, J.A., Beyer, G.P., Chater, R.J. (1994) 18O studies of altered layers formed in Si and SiO2 by ion bombardment. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 84 (2). 176-180 doi:10.1016/0168-583x(94)95749-5
Yupu, Li, Kilner, J.A., Chater, R.J., Nejim, A., Hemment, P.L.F., Marsh, C.D., Booker, G.R. (1994) Oxygen isotopic exchange during the annealing of low energy SIMOX layers. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 85 (1). 236-242 doi:10.1016/0168-583x(94)95819-x
 
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