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Chater, R.J., Kilner, J.A., Reeson, K.J., Robinson, A.K., Hemment, P.L.F. (1991) High-dose oxygen implantation into silica. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 686-690 doi:10.1016/0168-583x(91)96258-m

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Reference TypeJournal (article/letter/editorial)
TitleHigh-dose oxygen implantation into silica
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsChater, R.J.Author
Kilner, J.A.Author
Reeson, K.J.Author
Robinson, A.K.Author
Hemment, P.L.F.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96258-mSearch in ResearchGate
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Mindat Ref. ID5596485Long-form Identifiermindat:1:5:5596485:4
GUID0
Full ReferenceChater, R.J., Kilner, J.A., Reeson, K.J., Robinson, A.K., Hemment, P.L.F. (1991) High-dose oxygen implantation into silica. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 686-690 doi:10.1016/0168-583x(91)96258-m
Plain TextChater, R.J., Kilner, J.A., Reeson, K.J., Robinson, A.K., Hemment, P.L.F. (1991) High-dose oxygen implantation into silica. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 686-690 doi:10.1016/0168-583x(91)96258-m
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

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Chater, R.J., Kilner, J.A., Reeson, K.J., Robinson, A.K., Hemment, P.L.F. (1990) 18O isotope studies on the redistribution of oxygen in noncontinuous buried layers formed by high-dose oxygen ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 45 (1). 110-114 doi:10.1016/0168-583x(90)90796-w
Kilner, J.A., Chater, R.J., Reeson, K.J., Hemment, P.L.F., Davis, J.R. (1989) Nitrogen-15 isotope tracer studies of buried nitride layer formation by high dose implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 225-229 doi:10.1016/0168-583x(89)90776-3
Chater, R.J., Kilner, J.A., Hemment, P.L.F., Reeson, K.J., Davis, J.R. (1987) The evolution of the Si/SiO2 interface in buried oxide layers formed by high dose oxygen implantation into silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 290-293 doi:10.1016/s0168-583x(87)80059-9
Robinson, A.K., Marsh, C.D., Bussmann, U., Kilner, J.A., Li, Y., Vanhellemont, J., Reeson, K.J., Hemment, P.L.F., Booker, G.R. (1991) Formation of thin silicon films using low energy oxygen ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 555-560 doi:10.1016/0168-583x(91)96229-e
Kilner, J.A., Chater, R.J., Hemment, P.L.F., Peart, R.F., Reeson, K.J., Arrowsmith, R.P., Davis, J.R. (1986) SIMS analysis of buried silicon nitride layers formed by high dose implantation of 14N and 15N. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 15 (1). 214-217 doi:10.1016/0168-583x(86)90288-0
Hemment, P.L.F., Reeson, K.J., Robinson, A.K., Kilner, J.A., Chater, R.J., Marsh, C.D., Christensen, K.N., Davis, J.R. (1989) Nonplanar and noncontinuous buried layers of SiO2 in silicon formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 766-769 doi:10.1016/0168-583x(89)90294-2
Hemment, P.L.F., Reeson, K.J., Robinson, A.K., Stoemenos, J., Kilner, J.A., Chater, R.J., Celler, G.K., Davis, J.R. (1989) Nucleation and growth of SiO2 precipitates in SOI/SIMOX related materials β€” Dependence upon damage and atomic oxygen profiles. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 210-214 doi:10.1016/0168-583x(89)90773-8
Griffin, C.J., Kilner, J.A., Chater, R.J., Staton-Bevan, A., Reeson, K.J., Hemment, P.L.F., Davis, J.R. (1989) A SIMS and TEM analysis of the growth mechanisms of annealed buried SiO2 layers formed by incremental high-dose oxygen Ion implantation into silicon at 150 keV. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 215-219 doi:10.1016/0168-583x(89)90774-x
Hemment, P.L.F., Reeson, K.J., Kilner, J.A., Chater, R.J., Marsh, C., Booker, G.R., Davis, J.R., Celler, G.K. (1987) Novel dielectric/silicon planar structures formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 129-133 doi:10.1016/0168-583x(87)90811-1
Reeson, K.J., Hemment, P.L.F., Meekison, C.D., Marsh, C.D., Booker, G.R., Chater, R.J., Kilner, J.A., Davis, J. (1988) Buried layers of silicon oxy-nitride fabricated using ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 32 (1). 427-432 doi:10.1016/0168-583x(88)90250-9
Steigmeier, E.F., Harbeke, G., Reeson, K.J., Hemment, P.L.F., Robinson, A.K. (1989) Nondestructive assessment of SIMOX substrates. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 304-307 doi:10.1016/0168-583x(89)90191-2
 
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