Hemment, P.L.F., Reeson, K.J., Robinson, A.K., Stoemenos, J., Kilner, J.A., Chater, R.J., Celler, G.K., Davis, J.R. (1989) Nucleation and growth of SiO2 precipitates in SOI/SIMOX related materials — Dependence upon damage and atomic oxygen profiles. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 210-214 doi:10.1016/0168-583x(89)90773-8
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Nucleation and growth of SiO2 precipitates in SOI/SIMOX related materials — Dependence upon damage and atomic oxygen profiles | ||
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
| Authors | Hemment, P.L.F. | Author | |
| Reeson, K.J. | Author | ||
| Robinson, A.K. | Author | ||
| Stoemenos, J. | Author | ||
| Kilner, J.A. | Author | ||
| Chater, R.J. | Author | ||
| Celler, G.K. | Author | ||
| Davis, J.R. | Author | ||
| Year | 1989 (March) | Volume | 39 |
| Issue | 1 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/0168-583x(89)90773-8Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5592414 | Long-form Identifier | mindat:1:5:5592414:8 |
| GUID | 0 | ||
| Full Reference | Hemment, P.L.F., Reeson, K.J., Robinson, A.K., Stoemenos, J., Kilner, J.A., Chater, R.J., Celler, G.K., Davis, J.R. (1989) Nucleation and growth of SiO2 precipitates in SOI/SIMOX related materials — Dependence upon damage and atomic oxygen profiles. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 210-214 doi:10.1016/0168-583x(89)90773-8 | ||
| Plain Text | Hemment, P.L.F., Reeson, K.J., Robinson, A.K., Stoemenos, J., Kilner, J.A., Chater, R.J., Celler, G.K., Davis, J.R. (1989) Nucleation and growth of SiO2 precipitates in SOI/SIMOX related materials — Dependence upon damage and atomic oxygen profiles. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 210-214 doi:10.1016/0168-583x(89)90773-8 | ||
| In | (1989, March) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 39 (1) Elsevier BV | ||
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