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Delfino, M., Morgan, A.E., Sadana, D.K. (1987) Boron implantation into silicon amorphized by tin implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 363-368 doi:10.1016/s0168-583x(87)80073-3

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Reference TypeJournal (article/letter/editorial)
TitleBoron implantation into silicon amorphized by tin implantation
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsDelfino, M.Author
Morgan, A.E.Author
Sadana, D.K.Author
Year1987 (January)Volume19
PublisherElsevier BV
DOIdoi:10.1016/s0168-583x(87)80073-3Search in ResearchGate
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Mindat Ref. ID5587717Long-form Identifiermindat:1:5:5587717:8
GUID0
Full ReferenceDelfino, M., Morgan, A.E., Sadana, D.K. (1987) Boron implantation into silicon amorphized by tin implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 363-368 doi:10.1016/s0168-583x(87)80073-3
Plain TextDelfino, M., Morgan, A.E., Sadana, D.K. (1987) Boron implantation into silicon amorphized by tin implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 363-368 doi:10.1016/s0168-583x(87)80073-3
In(1987) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 19. Elsevier BV

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Tokuyama, Takashi (1987) Trends in ion implantation in silicon VLSI technology. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 299-306 doi:10.1016/s0168-583x(87)80061-7
Linker, G. (1987) The occurrence of strain in amorphization studies by ion implantation: Boron into niobium and molybdenum films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 526-532 doi:10.1016/s0168-583x(87)80105-2
Gerard, P. (1987) Ion implantation in magnetic garnet. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 843-850 doi:10.1016/s0168-583x(87)80169-6
McHargue, C.J., Farlow, G.C., Lewis, M.B., Williams, J.M. (1987) Implantation of gases into sapphire. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 809-812 doi:10.1016/s0168-583x(87)80162-3
Rangaswamy, M., Farkas, D., Sobel, H.L. (1987) Simulation of high fluence N implantation into Fe. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 196-199 doi:10.1016/s0168-583x(87)80041-1
Hill, Chris (1987) Shallow junctions by ion implantation and rapid thermal annealing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 348-358 doi:10.1016/s0168-583x(87)80071-x
Mouritz, A.P., Sood, D.K., St John, D.H., Swain, M.V., Williams, J.S. (1987) Ion implantation of low melting point metals into sapphire. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 805-808 doi:10.1016/s0168-583x(87)80161-1
Ohira, Shigeo, Iwaki, Masaya (1987) Formation of ain by nitrogen molecule ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 162-166 doi:10.1016/s0168-583x(87)80034-4
Knystautas, Emile J., Singh, Amatjit, Fiseti, Michel (1987) Hardening of Ti-coated 4145 steel following boron ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 213-215 doi:10.1016/s0168-583x(87)80045-9
Fried, M., Lohner, T., Jároli, E., Vízkelethy, G., Kótai, E., Gyulai, J., Bíró, A., Ádám, J., Somogyi, M., Kerkow, H. (1987) Optical properties of thermally stabilized ion implantation amorphized silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 577-581 doi:10.1016/s0168-583x(87)80115-5
Belz, J., Te Kaat, E.H., Zimmer, G., Vogt, H. (1987) Characterization of buried silicon-nitride formed by nitrogen implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 279-284 doi:10.1016/s0168-583x(87)80057-5
 
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