Fried, M., Lohner, T., Jároli, E., Vízkelethy, G., Kótai, E., Gyulai, J., Bíró, A., Ádám, J., Somogyi, M., Kerkow, H. (1987) Optical properties of thermally stabilized ion implantation amorphized silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 577-581 doi:10.1016/s0168-583x(87)80115-5
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Optical properties of thermally stabilized ion implantation amorphized silicon | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Fried, M. | Author | |
Lohner, T. | Author | ||
Jároli, E. | Author | ||
Vízkelethy, G. | Author | ||
Kótai, E. | Author | ||
Gyulai, J. | Author | ||
Bíró, A. | Author | ||
Ádám, J. | Author | ||
Somogyi, M. | Author | ||
Kerkow, H. | Author | ||
Year | 1987 (January) | Volume | 19 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/s0168-583x(87)80115-5Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5587802 | Long-form Identifier | mindat:1:5:5587802:5 |
GUID | 0 | ||
Full Reference | Fried, M., Lohner, T., Jároli, E., Vízkelethy, G., Kótai, E., Gyulai, J., Bíró, A., Ádám, J., Somogyi, M., Kerkow, H. (1987) Optical properties of thermally stabilized ion implantation amorphized silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 577-581 doi:10.1016/s0168-583x(87)80115-5 | ||
Plain Text | Fried, M., Lohner, T., Jároli, E., Vízkelethy, G., Kótai, E., Gyulai, J., Bíró, A., Ádám, J., Somogyi, M., Kerkow, H. (1987) Optical properties of thermally stabilized ion implantation amorphized silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 577-581 doi:10.1016/s0168-583x(87)80115-5 | ||
In | (1987) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 19. Elsevier BV |
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