Bunker, S.N., Sioshansi, P., Sanfacon, M., Mogro-Campero, A., Smith, G.A. (1987) Analysis of buried layers from high dose oxygen ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 148-150 doi:10.1016/0168-583x(87)90814-7
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Analysis of buried layers from high dose oxygen ion implantation | ||
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
| Authors | Bunker, S.N. | Author | |
| Sioshansi, P. | Author | ||
| Sanfacon, M. | Author | ||
| Mogro-Campero, A. | Author | ||
| Smith, G.A. | Author | ||
| Year | 1987 (January) | Volume | 21 |
| Issue | 1 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/0168-583x(87)90814-7Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5588052 | Long-form Identifier | mindat:1:5:5588052:5 |
| GUID | 0 | ||
| Full Reference | Bunker, S.N., Sioshansi, P., Sanfacon, M., Mogro-Campero, A., Smith, G.A. (1987) Analysis of buried layers from high dose oxygen ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 148-150 doi:10.1016/0168-583x(87)90814-7 | ||
| Plain Text | Bunker, S.N., Sioshansi, P., Sanfacon, M., Mogro-Campero, A., Smith, G.A. (1987) Analysis of buried layers from high dose oxygen ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 148-150 doi:10.1016/0168-583x(87)90814-7 | ||
| In | (1987, January) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 21 (1) Elsevier BV | ||
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