Eddy, R., Long, A., Smith, S., Tkach, J. (1987) Improvements in dose uniformity on high current ion implantation systems. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 424-427 doi:10.1016/0168-583x(87)90870-6
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Improvements in dose uniformity on high current ion implantation systems | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Eddy, R. | Author | |
Long, A. | Author | ||
Smith, S. | Author | ||
Tkach, J. | Author | ||
Year | 1987 (January) | Volume | 21 |
Issue | 1 | ||
Publisher | Elsevier BV | ||
DOI | doi:10.1016/0168-583x(87)90870-6Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5588166 | Long-form Identifier | mindat:1:5:5588166:7 |
GUID | 0 | ||
Full Reference | Eddy, R., Long, A., Smith, S., Tkach, J. (1987) Improvements in dose uniformity on high current ion implantation systems. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 424-427 doi:10.1016/0168-583x(87)90870-6 | ||
Plain Text | Eddy, R., Long, A., Smith, S., Tkach, J. (1987) Improvements in dose uniformity on high current ion implantation systems. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 424-427 doi:10.1016/0168-583x(87)90870-6 | ||
In | (1987, January) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 21 (1) Elsevier BV |
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