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Reeson, K.J., Stephens, K.G., Hemment, P.L.F. (1989) Optimisation of SIMOX structures formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 290-295 doi:10.1016/0168-583x(89)90188-2

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Reference TypeJournal (article/letter/editorial)
TitleOptimisation of SIMOX structures formed by ion beam synthesis
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsReeson, K.J.Author
Stephens, K.G.Author
Hemment, P.L.F.Author
Year1989 (February)Volume37
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(89)90188-2Search in ResearchGate
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Mindat Ref. ID5592012Long-form Identifiermindat:1:5:5592012:4
GUID0
Full ReferenceReeson, K.J., Stephens, K.G., Hemment, P.L.F. (1989) Optimisation of SIMOX structures formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 290-295 doi:10.1016/0168-583x(89)90188-2
Plain TextReeson, K.J., Stephens, K.G., Hemment, P.L.F. (1989) Optimisation of SIMOX structures formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 290-295 doi:10.1016/0168-583x(89)90188-2
In(1989) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 37. Elsevier BV

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Steigmeier, E.F., Harbeke, G., Reeson, K.J., Hemment, P.L.F., Robinson, A.K. (1989) Nondestructive assessment of SIMOX substrates. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 304-307 doi:10.1016/0168-583x(89)90191-2
Stephens, K.G., Reeson, K.J., Sealy, B.J., Gwilliam, R.M., Hemment, P.L.F. (1990) The formation of compound layers in silicon by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 50 (1). 368-378 doi:10.1016/0168-583x(90)90383-6
Hemment, P.L.F., Reeson, K.J., Robinson, A.K., Kilner, J.A., Chater, R.J., Marsh, C.D., Christensen, K.N., Davis, J.R. (1989) Nonplanar and noncontinuous buried layers of SiO2 in silicon formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 766-769 doi:10.1016/0168-583x(89)90294-2
Homewood, K.P., Reeson, K.J., Lourenco, M.A., Hemment, P.L.F., Davis, J.R. (1989) Evaluation of SOI/SIMOX substrates using photoconductive frequency resolved spectroscopy (PCRFS). Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 207-209 doi:10.1016/0168-583x(89)90772-6
Hemment, P.L.F., Reeson, K.J., Kilner, J.A., Chater, R.J., Marsh, C., Booker, G.R., Davis, J.R., Celler, G.K. (1987) Novel dielectric/silicon planar structures formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 129-133 doi:10.1016/0168-583x(87)90811-1
Barklie, R.C., Ennis, T.J., Reeson, K.J., Hemment, P.L.F. (1992) E'1 centres in buried oxide layers formed by oxygen ion implantation into silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 65 (1). 93-96 doi:10.1016/0168-583x(92)95019-n
Li, Y., Kilner, J.A., Hemment, P.L.F., Robinson, A.K., Zhang, J.P., Reeson, K.J., Marsh, C.D., Booker, G.R. (1992) SIMS, RBS, ion channelling, and TEM studies of the low energy SIMOX structures. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 64 (1). 750-755 doi:10.1016/0168-583x(92)95571-8
Kilner, J.A., Chater, R.J., Reeson, K.J., Hemment, P.L.F., Davis, J.R. (1989) Nitrogen-15 isotope tracer studies of buried nitride layer formation by high dose implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 225-229 doi:10.1016/0168-583x(89)90776-3
Sealy, B.J., Hemment, P.L.F. (1994) Ion beam techniques in microelectronics. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 89 (1). 298-306 doi:10.1016/0168-583x(94)95189-6
Geatches, R.M., Reason, K.J., Griddle, A.J., Webb, R.P., Pearson, P.J., Hemment, P.L.F., Nejim, A. (1994) Nondestructive characterization of SIMOX structures. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 84 (2). 258-264 doi:10.1016/0168-583x(94)95766-5
Barklie, R.C., Ennis, T.J., Hemment, P.L.F., Reeson, K. (1988) Defects in SiO2 in buried-oxide structures formed by O+ implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 32 (1). 433-436 doi:10.1016/0168-583x(88)90251-0
 
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