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Li, Y., Kilner, J.A., Hemment, P.L.F., Robinson, A.K., Zhang, J.P., Reeson, K.J., Marsh, C.D., Booker, G.R. (1992) SIMS, RBS, ion channelling, and TEM studies of the low energy SIMOX structures. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 64 (1). 750-755 doi:10.1016/0168-583x(92)95571-8

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Reference TypeJournal (article/letter/editorial)
TitleSIMS, RBS, ion channelling, and TEM studies of the low energy SIMOX structures
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsLi, Y.Author
Kilner, J.A.Author
Hemment, P.L.F.Author
Robinson, A.K.Author
Zhang, J.P.Author
Reeson, K.J.Author
Marsh, C.D.Author
Booker, G.R.Author
Year1992 (February)Volume64
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(92)95571-8Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5599008Long-form Identifiermindat:1:5:5599008:0
GUID0
Full ReferenceLi, Y., Kilner, J.A., Hemment, P.L.F., Robinson, A.K., Zhang, J.P., Reeson, K.J., Marsh, C.D., Booker, G.R. (1992) SIMS, RBS, ion channelling, and TEM studies of the low energy SIMOX structures. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 64 (1). 750-755 doi:10.1016/0168-583x(92)95571-8
Plain TextLi, Y., Kilner, J.A., Hemment, P.L.F., Robinson, A.K., Zhang, J.P., Reeson, K.J., Marsh, C.D., Booker, G.R. (1992) SIMS, RBS, ion channelling, and TEM studies of the low energy SIMOX structures. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 64 (1). 750-755 doi:10.1016/0168-583x(92)95571-8
In(1992, February) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 64 (1) Elsevier BV

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Robinson, A.K., Marsh, C.D., Bussmann, U., Kilner, J.A., Li, Y., Vanhellemont, J., Reeson, K.J., Hemment, P.L.F., Booker, G.R. (1991) Formation of thin silicon films using low energy oxygen ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 555-560 doi:10.1016/0168-583x(91)96229-e
Nejim, A., Li, Y., Marsh, C.D., Hemment, P.L.F., Chater, R.J., Kilner, J.A., Booker, G.R. (1993) Direct formation of device worthy thin film SIMOX structures by low energy oxygen implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 80. 822-826 doi:10.1016/0168-583x(93)90690-8
Reeson, K.J., Hemment, P.L.F., Meekison, C.D., Marsh, C.D., Booker, G.R., Chater, R.J., Kilner, J.A., Davis, J. (1988) Buried layers of silicon oxy-nitride fabricated using ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 32 (1). 427-432 doi:10.1016/0168-583x(88)90250-9
Hemment, P.L.F., Reeson, K.J., Kilner, J.A., Chater, R.J., Marsh, C., Booker, G.R., Davis, J.R., Celler, G.K. (1987) Novel dielectric/silicon planar structures formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 129-133 doi:10.1016/0168-583x(87)90811-1
Yupu, Li, Kilner, J.A., Chater, R.J., Nejim, A., Hemment, P.L.F., Marsh, C.D., Booker, G.R. (1994) Oxygen isotopic exchange during the annealing of low energy SIMOX layers. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 85 (1). 236-242 doi:10.1016/0168-583x(94)95819-x
Hemment, P.L.F., Reeson, K.J., Robinson, A.K., Kilner, J.A., Chater, R.J., Marsh, C.D., Christensen, K.N., Davis, J.R. (1989) Nonplanar and noncontinuous buried layers of SiO2 in silicon formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 766-769 doi:10.1016/0168-583x(89)90294-2
Chater, R.J., Kilner, J.A., Reeson, K.J., Robinson, A.K., Hemment, P.L.F. (1991) High-dose oxygen implantation into silica. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 686-690 doi:10.1016/0168-583x(91)96258-m
Steigmeier, E.F., Harbeke, G., Reeson, K.J., Hemment, P.L.F., Robinson, A.K. (1989) Nondestructive assessment of SIMOX substrates. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 304-307 doi:10.1016/0168-583x(89)90191-2
Nejim, A., Li, Y., Marsh, C.D., Hemment, P.L.F., Chater, R.J., Kilner, J.A., Giles, L.F., Booker, G.R. (1993) Process optimisation for direct formation of device worthy thin film SIMOX structures using 90 keV oxygen implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 74 (1). 170-174 doi:10.1016/0168-583x(93)95037-6
Reeson, K.J., Stephens, K.G., Hemment, P.L.F. (1989) Optimisation of SIMOX structures formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 290-295 doi:10.1016/0168-583x(89)90188-2
Marsh, C.D., Nejim, A., Li, Y., Booker, G.R., Hemment, P.L.F., Chater, R.J., Kilner, J.A. (1993) Control of the buried SiO2 layer thickness and Si defect density in SIMOX substrates β€” structural investigation and process optimisation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 74 (1). 197-203 doi:10.1016/0168-583x(93)95042-4
 
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