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Barklie, R.C., Ennis, T.J., Hemment, P.L.F., Reeson, K. (1988) Defects in SiO2 in buried-oxide structures formed by O+ implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 32 (1). 433-436 doi:10.1016/0168-583x(88)90251-0

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Reference TypeJournal (article/letter/editorial)
TitleDefects in SiO2 in buried-oxide structures formed by O+ implantation
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsBarklie, R.C.Author
Ennis, T.J.Author
Hemment, P.L.F.Author
Reeson, K.Author
Year1988 (May)Volume32
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(88)90251-0Search in ResearchGate
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Mindat Ref. ID5590825Long-form Identifiermindat:1:5:5590825:6
GUID0
Full ReferenceBarklie, R.C., Ennis, T.J., Hemment, P.L.F., Reeson, K. (1988) Defects in SiO2 in buried-oxide structures formed by O+ implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 32 (1). 433-436 doi:10.1016/0168-583x(88)90251-0
Plain TextBarklie, R.C., Ennis, T.J., Hemment, P.L.F., Reeson, K. (1988) Defects in SiO2 in buried-oxide structures formed by O+ implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 32 (1). 433-436 doi:10.1016/0168-583x(88)90251-0
In(1988, May) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 32 (1) Elsevier BV

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Barklie, R.C., Ennis, T.J., Reeson, K.J., Hemment, P.L.F. (1992) E'1 centres in buried oxide layers formed by oxygen ion implantation into silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 65 (1). 93-96 doi:10.1016/0168-583x(92)95019-n
Reeson, K.J., Stephens, K.G., Hemment, P.L.F. (1989) Optimisation of SIMOX structures formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 290-295 doi:10.1016/0168-583x(89)90188-2
Chater, R.J., Kilner, J.A., Hemment, P.L.F., Reeson, K.J., Davis, J.R. (1987) The evolution of the Si/SiO2 interface in buried oxide layers formed by high dose oxygen implantation into silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 19. 290-293 doi:10.1016/s0168-583x(87)80059-9
Kilner, J.A., Chater, R.J., Hemment, P.L.F., Peart, R.F., Reeson, K.J., Arrowsmith, R.P., Davis, J.R. (1986) SIMS analysis of buried silicon nitride layers formed by high dose implantation of 14N and 15N. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 15 (1). 214-217 doi:10.1016/0168-583x(86)90288-0
Reeson, K.J., Hemment, P.L.F., Meekison, C.D., Marsh, C.D., Booker, G.R., Chater, R.J., Kilner, J.A., Davis, J. (1988) Buried layers of silicon oxy-nitride fabricated using ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 32 (1). 427-432 doi:10.1016/0168-583x(88)90250-9
Hemment, P.L.F., Reeson, K.J., Robinson, A.K., Kilner, J.A., Chater, R.J., Marsh, C.D., Christensen, K.N., Davis, J.R. (1989) Nonplanar and noncontinuous buried layers of SiO2 in silicon formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 766-769 doi:10.1016/0168-583x(89)90294-2
Chater, R.J., Kilner, J.A., Reeson, K.J., Robinson, A.K., Hemment, P.L.F. (1990) 18O isotope studies on the redistribution of oxygen in noncontinuous buried layers formed by high-dose oxygen ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 45 (1). 110-114 doi:10.1016/0168-583x(90)90796-w
Kilner, J.A., Chater, R.J., Reeson, K.J., Hemment, P.L.F., Davis, J.R. (1989) Nitrogen-15 isotope tracer studies of buried nitride layer formation by high dose implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 39 (1). 225-229 doi:10.1016/0168-583x(89)90776-3
Chater, R.J., Kilner, J.A., Reeson, K.J., Robinson, A.K., Hemment, P.L.F. (1991) High-dose oxygen implantation into silica. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 686-690 doi:10.1016/0168-583x(91)96258-m
Sealy, L., Barklie, R.C., Reeson, K.J., Brown, W.L., Jacobson, D.C. (1992) EPR and RBS study of defects produced by MeV ion implantation into silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 62 (3). 384-387 doi:10.1016/0168-583x(92)95261-o
Hemment, P.L.F., Reeson, K.J., Kilner, J.A., Chater, R.J., Marsh, C., Booker, G.R., Davis, J.R., Celler, G.K. (1987) Novel dielectric/silicon planar structures formed by ion beam synthesis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 21 (1). 129-133 doi:10.1016/0168-583x(87)90811-1
 
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