Ito, H., Minowa, Y., Ina, T. (1989) High-speed low-temperature film preparation by an ionized cluster beam, assisted by an ionized gas beam. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 814-817 doi:10.1016/0168-583x(89)90304-2
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | High-speed low-temperature film preparation by an ionized cluster beam, assisted by an ionized gas beam | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Ito, H. | Author | |
Minowa, Y. | Author | ||
Ina, T. | Author | ||
Year | 1989 (February) | Volume | 37 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/0168-583x(89)90304-2Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5592246 | Long-form Identifier | mindat:1:5:5592246:9 |
GUID | 0 | ||
Full Reference | Ito, H., Minowa, Y., Ina, T. (1989) High-speed low-temperature film preparation by an ionized cluster beam, assisted by an ionized gas beam. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 814-817 doi:10.1016/0168-583x(89)90304-2 | ||
Plain Text | Ito, H., Minowa, Y., Ina, T. (1989) High-speed low-temperature film preparation by an ionized cluster beam, assisted by an ionized gas beam. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 814-817 doi:10.1016/0168-583x(89)90304-2 | ||
In | (1989) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 37. Elsevier BV |
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