Felch, S.B., Mehta, S., Kikuchi, S., Kitahara, S. (1991) Device charge-to-breakdown studies on a high-current implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 82-85 doi:10.1016/0168-583x(91)96140-g
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Device charge-to-breakdown studies on a high-current implanter | ||
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
| Authors | Felch, S.B. | Author | |
| Mehta, S. | Author | ||
| Kikuchi, S. | Author | ||
| Kitahara, S. | Author | ||
| Year | 1991 (April) | Volume | 55 |
| Issue | 1 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/0168-583x(91)96140-gSearch in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5596247 | Long-form Identifier | mindat:1:5:5596247:6 |
| GUID | 0 | ||
| Full Reference | Felch, S.B., Mehta, S., Kikuchi, S., Kitahara, S. (1991) Device charge-to-breakdown studies on a high-current implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 82-85 doi:10.1016/0168-583x(91)96140-g | ||
| Plain Text | Felch, S.B., Mehta, S., Kikuchi, S., Kitahara, S. (1991) Device charge-to-breakdown studies on a high-current implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 82-85 doi:10.1016/0168-583x(91)96140-g | ||
| In | (1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV | ||
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