Vote for your favorite mineral in #MinCup25! - Baryte vs. Hematite
It's a heavyweight match between industrial powerhouses as soft #baryte competes against rusty red #hematite.
Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

Simonton, Robert B., Kamenitsa, Dennis E., Ray, Andy M. (1991) Process control issues for ion implantation using large tilt angles. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 188-192 doi:10.1016/0168-583x(91)96159-i

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleProcess control issues for ion implantation using large tilt angles
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsSimonton, Robert B.Author
Kamenitsa, Dennis E.Author
Ray, Andy M.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96159-iSearch in ResearchGate
Generate Citation Formats
Mindat Ref. ID5596285Long-form Identifiermindat:1:5:5596285:6
GUID0
Full ReferenceSimonton, Robert B., Kamenitsa, Dennis E., Ray, Andy M. (1991) Process control issues for ion implantation using large tilt angles. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 188-192 doi:10.1016/0168-583x(91)96159-i
Plain TextSimonton, Robert B., Kamenitsa, Dennis E., Ray, Andy M. (1991) Process control issues for ion implantation using large tilt angles. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 188-192 doi:10.1016/0168-583x(91)96159-i
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

See Also

These are possibly similar items as determined by title/reference text matching only.

Simonton, Robert B., Kamenitsa, Dennis E., Ray, Andrew M., Park, Changhae, Klein, Kevin M., Tasch, Al F. (1991) Channeling control for large tilt angle implantation in Si γ€ˆ100〉. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 39-44 doi:10.1016/0168-583x(91)96132-5
Dykstra, Jerald P., Ray, Andy M., Simonton, Robert B. (1991) A versatile ion implanter for planar and 3D device construction. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 478-481 doi:10.1016/0168-583x(91)96216-8
Simonton, Robert, Kamenitsa, Dennis (1989) Channeling control in silicon γ€ˆ111〉 substrates by target orientation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 344-347 doi:10.1016/0168-583x(89)90200-0
Kamenitsa, Dennis E., Simonton, Robert B. (1993) Sources of variation in therma wave measurements of ion implanted wafers. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 74 (1). 234-237 doi:10.1016/0168-583x(93)95050-f
Simonton, Robert, King, Monty, Kamenitsa, Dennis E. (1989) Higher charge state ion beam purity in the Eaton medium current implanter. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 616-619 doi:10.1016/0168-583x(89)90260-7
Park, Changhae, Klein, Kevin M., Tasch, Al F., Simonton, Robert B., Kamenitsa, Dennis E., Novak, Steve (1991) Boron implant profile variation across a single wafer due to electrostatic scanning. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 59. 159-163 doi:10.1016/0168-583x(91)95198-m
Ray, Andy M., Dykstra, Jerald P. (1991) Beam incidence variations in spinning disk ion implanters. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 488-492 doi:10.1016/0168-583x(91)96218-a
Holmes, A.J.T., Proudfoot, G. (1991) Negative-ion sources for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 323-327 doi:10.1016/0168-583x(91)96186-o
Posselt, M., Sobeslavsky, E., Otto, G. (1991) Investigation of backscattering and re-implantation during ion implantation into deep trenches. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 220-223 doi:10.1016/0168-583x(91)96166-i
Bausells, J., Badenes, G., Lora-Tamayo, E. (1991) Calculation of channeling effects in ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 666-670 doi:10.1016/0168-583x(91)96254-i
Hill, Chris, Hunt, Peter (1991) Ion implantation in bipolar technology. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 1-8 doi:10.1016/0168-583x(91)96125-5
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are Β© OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: September 19, 2025 00:10:59
Go to top of page