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Gorbatov, Yu.B., Vyatkin, A.F., Zinenko, V.I. (1991) A low-energy fast-atom beam source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 328-330 doi:10.1016/0168-583x(91)96187-p

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Reference TypeJournal (article/letter/editorial)
TitleA low-energy fast-atom beam source
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsGorbatov, Yu.B.Author
Vyatkin, A.F.Author
Zinenko, V.I.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96187-pSearch in ResearchGate
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Mindat Ref. ID5596341Long-form Identifiermindat:1:5:5596341:1
GUID0
Full ReferenceGorbatov, Yu.B., Vyatkin, A.F., Zinenko, V.I. (1991) A low-energy fast-atom beam source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 328-330 doi:10.1016/0168-583x(91)96187-p
Plain TextGorbatov, Yu.B., Vyatkin, A.F., Zinenko, V.I. (1991) A low-energy fast-atom beam source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 328-330 doi:10.1016/0168-583x(91)96187-p
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

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Vyatkin, A.F., Simonov, V.V., Kholopkin, A.I. (1991) Development of ion implantation equipment in the USSR. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 386-392 doi:10.1016/0168-583x(91)96199-u
Shimokawa, Fusao, Nagai, Kazutoshi (1988) A low-energy fast-atom source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 33 (1). 867-870 doi:10.1016/0168-583x(88)90701-x
(1991) Editorial Board. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96122-2
Kholopkin, A.I., Lyakhov, M.N., Pankratenko, D.A., Simonov, V.V., Vyatkin, A.F. (1991) Ion projection lithography process on dry resist. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 902-904 doi:10.1016/0168-583x(91)96304-4
Stephens, K.G. (1991) Editorial. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). doi:10.1016/0168-583x(91)96123-3
Starkov, V.V., Hemment, P.L.F., Vyatkin, A.F. (1991) Amorphisation and solid phase epitaxial regrowth of the silicon overlayer in SIMOX structures. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 701-704 doi:10.1016/0168-583x(91)96261-i
Barabanenkov, M.Yu., Agafonov, Yu.A., Mordkovich, V.N., Pustovit, A.N., Vyatkin, A.F., Zinenko, V.I. (2000) Polyenergy ion beam synthesis of buried oxynitride layer in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 171 (3). 301-308 doi:10.1016/s0168-583x(00)00261-5
Buravlyov, A.V., Vyatkin, A.F., Egorov, V.K., Kireiko, V.V., Zuev, A.P. (1991) Some properties of amorphous silicon produced by helium ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 642-646 doi:10.1016/0168-583x(91)96249-k
(1991) Author index. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 905-920 doi:10.1016/0168-583x(91)96305-5
Vyatkin, A.F., Buravlev, A.V., Zuev, A.P. (1991) Point defect induced solid phase epitaxial growth and amorphisation of silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 59. 431-433 doi:10.1016/0168-583x(91)95253-a
(1991) Dedication. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 56. doi:10.1016/0168-583x(91)95952-a
 
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