Vyatkin, A.F., Simonov, V.V., Kholopkin, A.I. (1991) Development of ion implantation equipment in the USSR. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 386-392 doi:10.1016/0168-583x(91)96199-u
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Development of ion implantation equipment in the USSR | ||
Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
Authors | Vyatkin, A.F. | Author | |
Simonov, V.V. | Author | ||
Kholopkin, A.I. | Author | ||
Year | 1991 (April) | Volume | 55 |
Issue | 1 | ||
Publisher | Elsevier BV | ||
DOI | doi:10.1016/0168-583x(91)96199-uSearch in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5596366 | Long-form Identifier | mindat:1:5:5596366:0 |
GUID | 0 | ||
Full Reference | Vyatkin, A.F., Simonov, V.V., Kholopkin, A.I. (1991) Development of ion implantation equipment in the USSR. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 386-392 doi:10.1016/0168-583x(91)96199-u | ||
Plain Text | Vyatkin, A.F., Simonov, V.V., Kholopkin, A.I. (1991) Development of ion implantation equipment in the USSR. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 386-392 doi:10.1016/0168-583x(91)96199-u | ||
In | (1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV |
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