Reference Type | Journal (article/letter/editorial) |
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Title | Repetitively pulsed, high-concentration implantation |
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Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
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Authors | Ryabchikov, A.I. | Author |
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Nasyrov, R.A. | Author |
Year | 1991 (July) | Volume | 61 |
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Issue | 1 |
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Publisher | Elsevier BV |
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DOI | doi:10.1016/0168-583x(91)95559-vSearch in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 5598123 | Long-form Identifier | mindat:1:5:5598123:1 |
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GUID | 0 |
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Full Reference | Ryabchikov, A.I., Nasyrov, R.A. (1991) Repetitively pulsed, high-concentration implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 61 (1). 48-51 doi:10.1016/0168-583x(91)95559-v |
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Plain Text | Ryabchikov, A.I., Nasyrov, R.A. (1991) Repetitively pulsed, high-concentration implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 61 (1). 48-51 doi:10.1016/0168-583x(91)95559-v |
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In | (1991, July) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 61 (1) Elsevier BV |
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