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Bektursunova, Rimma M, Demokan, Ordal (2001) Perturbation analysis of sheath evolution, with application to plasma source ion implantation. Journal of Physics D: Applied Physics, 34. 326-329 doi:10.1088/0022-3727/34/3/313

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Reference TypeJournal (article/letter/editorial)
TitlePerturbation analysis of sheath evolution, with application to plasma source ion implantation
JournalJournal of Physics D: Applied Physics
AuthorsBektursunova, Rimma MAuthor
Demokan, OrdalAuthor
Year2001 (February 7)Volume34
PublisherIOP Publishing
DOIdoi:10.1088/0022-3727/34/3/313Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5668829Long-form Identifiermindat:1:5:5668829:8
GUID0
Full ReferenceBektursunova, Rimma M, Demokan, Ordal (2001) Perturbation analysis of sheath evolution, with application to plasma source ion implantation. Journal of Physics D: Applied Physics, 34. 326-329 doi:10.1088/0022-3727/34/3/313
Plain TextBektursunova, Rimma M, Demokan, Ordal (2001) Perturbation analysis of sheath evolution, with application to plasma source ion implantation. Journal of Physics D: Applied Physics, 34. 326-329 doi:10.1088/0022-3727/34/3/313
In(2000) Journal of Physics D: Applied Physics Vol. 34. IOP Publishing

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