Yilmaz, Gökhan, Cansever, Hamza, Sagban, H. Muzaffer, Günes, Mehmet, Smirnov, Vladimir, Finger, Friedhelm, Brüggemann, Rudi (2014) Reversible and irreversible effects after oxygen exposure in thick (>1 μm) silicon films deposited by VHF-PECVD on glass substrates investigated by dual beam photoconductivity. Canadian Journal of Physics, 92. 778-782 doi:10.1139/cjp-2013-0638
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Reversible and irreversible effects after oxygen exposure in thick (>1 μm) silicon films deposited by VHF-PECVD on glass substrates investigated by dual beam photoconductivity | ||
Journal | Canadian Journal of Physics | ||
Authors | Yilmaz, Gökhan | Author | |
Cansever, Hamza | Author | ||
Sagban, H. Muzaffer | Author | ||
Günes, Mehmet | Author | ||
Smirnov, Vladimir | Author | ||
Finger, Friedhelm | Author | ||
Brüggemann, Rudi | Author | ||
Year | 2014 (July) | Volume | 92 |
Publisher | Canadian Science Publishing | ||
DOI | doi:10.1139/cjp-2013-0638Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5996817 | Long-form Identifier | mindat:1:5:5996817:7 |
GUID | 0 | ||
Full Reference | Yilmaz, Gökhan, Cansever, Hamza, Sagban, H. Muzaffer, Günes, Mehmet, Smirnov, Vladimir, Finger, Friedhelm, Brüggemann, Rudi (2014) Reversible and irreversible effects after oxygen exposure in thick (>1 μm) silicon films deposited by VHF-PECVD on glass substrates investigated by dual beam photoconductivity. Canadian Journal of Physics, 92. 778-782 doi:10.1139/cjp-2013-0638 | ||
Plain Text | Yilmaz, Gökhan, Cansever, Hamza, Sagban, H. Muzaffer, Günes, Mehmet, Smirnov, Vladimir, Finger, Friedhelm, Brüggemann, Rudi (2014) Reversible and irreversible effects after oxygen exposure in thick (>1 μm) silicon films deposited by VHF-PECVD on glass substrates investigated by dual beam photoconductivity. Canadian Journal of Physics, 92. 778-782 doi:10.1139/cjp-2013-0638 | ||
In | (n.d.) Canadian Journal of Physics Vol. 92. Canadian Science Publishing |
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