Reference Type | Journal (article/letter/editorial) |
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Title | Erratum: Analysis of low‐pressure chemical vapor deposited silicon nitride by Rutherford backscattering spectrometry [Appl. Phys. Lett. 41, 844 (1982)] |
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Journal | Applied Physics Letters |
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Authors | Hwang, H. L. | Author |
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Hwu, C. C. | Author |
Liue, J. C. | Author |
Lin, H. H. | Author |
Year | 1983 (February) | Volume | 42 |
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Issue | 3 |
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Publisher | AIP Publishing |
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DOI | doi:10.1063/1.94117Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 8471736 | Long-form Identifier | mindat:1:5:8471736:2 |
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GUID | 0 |
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Full Reference | Hwang, H. L., Hwu, C. C., Liue, J. C., Lin, H. H. (1983) Erratum: Analysis of low‐pressure chemical vapor deposited silicon nitride by Rutherford backscattering spectrometry [Appl. Phys. Lett. 41, 844 (1982)]. Applied Physics Letters, 42 (3). 305 doi:10.1063/1.94117 |
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Plain Text | Hwang, H. L., Hwu, C. C., Liue, J. C., Lin, H. H. (1983) Erratum: Analysis of low‐pressure chemical vapor deposited silicon nitride by Rutherford backscattering spectrometry [Appl. Phys. Lett. 41, 844 (1982)]. Applied Physics Letters, 42 (3). 305 doi:10.1063/1.94117 |
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In | (1983, February) Applied Physics Letters Vol. 42 (3) AIP Publishing |
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