Asano, A., Sakai, H. (1989) Improvement in the boron doping efficiency of hydrogenated amorphous silicon carbide films using BF3. Applied Physics Letters, 54 (10). 904-906 doi:10.1063/1.100803
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Improvement in the boron doping efficiency of hydrogenated amorphous silicon carbide films using BF3 | ||
Journal | Applied Physics Letters | ||
Authors | Asano, A. | Author | |
Sakai, H. | Author | ||
Year | 1989 (March 6) | Volume | 54 |
Issue | 10 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.100803Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8485886 | Long-form Identifier | mindat:1:5:8485886:3 |
GUID | 0 | ||
Full Reference | Asano, A., Sakai, H. (1989) Improvement in the boron doping efficiency of hydrogenated amorphous silicon carbide films using BF3. Applied Physics Letters, 54 (10). 904-906 doi:10.1063/1.100803 | ||
Plain Text | Asano, A., Sakai, H. (1989) Improvement in the boron doping efficiency of hydrogenated amorphous silicon carbide films using BF3. Applied Physics Letters, 54 (10). 904-906 doi:10.1063/1.100803 | ||
In | (1989, March) Applied Physics Letters Vol. 54 (10) AIP Publishing |
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