Matsuoka, Morito, Ono, Ken’ichi (1989) New high‐rate sputtering‐type electron cyclotron resonance microwave plasma using an electric mirror. Applied Physics Letters, 54 (17). 1645-1647 doi:10.1063/1.101310
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | New high‐rate sputtering‐type electron cyclotron resonance microwave plasma using an electric mirror | ||
Journal | Applied Physics Letters | ||
Authors | Matsuoka, Morito | Author | |
Ono, Ken’ichi | Author | ||
Year | 1989 (April 24) | Volume | 54 |
Issue | 17 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.101310Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8486382 | Long-form Identifier | mindat:1:5:8486382:9 |
GUID | 0 | ||
Full Reference | Matsuoka, Morito, Ono, Ken’ichi (1989) New high‐rate sputtering‐type electron cyclotron resonance microwave plasma using an electric mirror. Applied Physics Letters, 54 (17). 1645-1647 doi:10.1063/1.101310 | ||
Plain Text | Matsuoka, Morito, Ono, Ken’ichi (1989) New high‐rate sputtering‐type electron cyclotron resonance microwave plasma using an electric mirror. Applied Physics Letters, 54 (17). 1645-1647 doi:10.1063/1.101310 | ||
In | (1989, April) Applied Physics Letters Vol. 54 (17) AIP Publishing |
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