Jakob, P., Dumas, P., Chabal, Y. J. (1991) Influence of silicon oxide on the morphology of HF‐etched Si(111) surfaces: Thermal versus chemical oxide. Applied Physics Letters, 59 (23). 2968-2970 doi:10.1063/1.105814
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Influence of silicon oxide on the morphology of HF‐etched Si(111) surfaces: Thermal versus chemical oxide | ||
Journal | Applied Physics Letters | ||
Authors | Jakob, P. | Author | |
Dumas, P. | Author | ||
Chabal, Y. J. | Author | ||
Year | 1991 (December 2) | Volume | 59 |
Issue | 23 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.105814Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 8496654 | Long-form Identifier | mindat:1:5:8496654:2 |
GUID | 0 | ||
Full Reference | Jakob, P., Dumas, P., Chabal, Y. J. (1991) Influence of silicon oxide on the morphology of HF‐etched Si(111) surfaces: Thermal versus chemical oxide. Applied Physics Letters, 59 (23). 2968-2970 doi:10.1063/1.105814 | ||
Plain Text | Jakob, P., Dumas, P., Chabal, Y. J. (1991) Influence of silicon oxide on the morphology of HF‐etched Si(111) surfaces: Thermal versus chemical oxide. Applied Physics Letters, 59 (23). 2968-2970 doi:10.1063/1.105814 | ||
In | (1991, December) Applied Physics Letters Vol. 59 (23) AIP Publishing |
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