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Bárdoš, L., Baránková, H., Berg, S. (1997) Linear arc discharge source for large area plasma processing. Applied Physics Letters, 70 (5). 577-579 doi:10.1063/1.118210

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Reference TypeJournal (article/letter/editorial)
TitleLinear arc discharge source for large area plasma processing
JournalApplied Physics Letters
AuthorsBárdoš, L.Author
Baránková, H.Author
Berg, S.Author
Year1997 (February 3)Volume70
Issue5
PublisherAIP Publishing
DOIdoi:10.1063/1.118210Search in ResearchGate
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Mindat Ref. ID8519069Long-form Identifiermindat:1:5:8519069:6
GUID0
Full ReferenceBárdoš, L., Baránková, H., Berg, S. (1997) Linear arc discharge source for large area plasma processing. Applied Physics Letters, 70 (5). 577-579 doi:10.1063/1.118210
Plain TextBárdoš, L., Baránková, H., Berg, S. (1997) Linear arc discharge source for large area plasma processing. Applied Physics Letters, 70 (5). 577-579 doi:10.1063/1.118210
In(1997, February) Applied Physics Letters Vol. 70 (5) AIP Publishing

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