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Bárdoš, L., Baránková, H., Welzel, Th., Dani, I., Peter, S., Richter, F. (2001) Comparison of the radio frequency hollow cathode to the microwave antenna discharge for plasma processing. Journal of Applied Physics, 90 (4). 1703-1709 doi:10.1063/1.1385355

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Reference TypeJournal (article/letter/editorial)
TitleComparison of the radio frequency hollow cathode to the microwave antenna discharge for plasma processing
JournalJournal of Applied Physics
AuthorsBárdoš, L.Author
Baránková, H.Author
Welzel, Th.Author
Dani, I.Author
Peter, S.Author
Richter, F.Author
Year2001 (August 15)Volume90
Issue4
PublisherAIP Publishing
DOIdoi:10.1063/1.1385355Search in ResearchGate
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Mindat Ref. ID5110078Long-form Identifiermindat:1:5:5110078:6
GUID0
Full ReferenceBárdoš, L., Baránková, H., Welzel, Th., Dani, I., Peter, S., Richter, F. (2001) Comparison of the radio frequency hollow cathode to the microwave antenna discharge for plasma processing. Journal of Applied Physics, 90 (4). 1703-1709 doi:10.1063/1.1385355
Plain TextBárdoš, L., Baránková, H., Welzel, Th., Dani, I., Peter, S., Richter, F. (2001) Comparison of the radio frequency hollow cathode to the microwave antenna discharge for plasma processing. Journal of Applied Physics, 90 (4). 1703-1709 doi:10.1063/1.1385355
In(2001, August) Journal of Applied Physics Vol. 90 (4) AIP Publishing

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Baránková, H., Bárdoš, L. (2000) Fused hollow cathode cold atmospheric plasma. Applied Physics Letters, 76 (3). 285-287 doi:10.1063/1.125723
Bárdoš, L., Baránková, H., Berg, S. (1997) Linear arc discharge source for large area plasma processing. Applied Physics Letters, 70 (5). 577-579 doi:10.1063/1.118210
Ohtsu, Yasunori, Kawasaki, Yujiro (2013) Criteria of radio-frequency ring-shaped hollow cathode discharge using H2 and Ar gases for plasma processing. Journal of Applied Physics, 113 (3). 33302pp. doi:10.1063/1.4776220
Söderström, D, Baránková, H, Bárdoš, L (2008) Time evolution of the space-charge sheath in an rf hollow cathode. Journal of Physics: Conference Series, 100. 62020pp. doi:10.1088/1742-6596/100/6/062020
Baránková, H., Bárdoš, L., Berg, S. (1995) Metastable assisted deposition of TiN films. Applied Physics Letters, 67 (11). 1521-1523 doi:10.1063/1.114479
Roberts, A. S., Bennett, W. H. (1964) Plasma Temperature Measurement for the Hollow Cathode Discharge. Journal of Applied Physics, 35 (12). 3434-3436 doi:10.1063/1.1713245
Baránková, H., Bardos, L., Bardos, A. (2015) Magnetized hollow cathode activated magnetron. Applied Physics Letters, 107 (15). 153501pp. doi:10.1063/1.4933091
Park, Jaeyoung, Henins, I., Herrmann, H. W., Selwyn, G. S., Hicks, R. F. (2001) Discharge phenomena of an atmospheric pressure radio-frequency capacitive plasma source. Journal of Applied Physics, 89 (1). 20-28 doi:10.1063/1.1323753
Welzel, Th., Dunger, Th., Kupfer, H., Richter, F. (2004) A time-resolved Langmuir double-probe method for the investigation of pulsed magnetron discharges. Journal of Applied Physics, 96 (12). 6994-7001 doi:10.1063/1.1808481
Pfeifer, Th., Richter, F., Welzel, Th., Kupfer, H., Willich, P. (2003) Influence of aluminum additions on phase formation in boron nitride films deposited by magnetron sputtering. Journal of Applied Physics, 93 (4). 2009-2014 doi:10.1063/1.1538322
Bickel, William S. (1966) Acoustical Plasma Wave in a Hollow Cathode Discharge. Journal of Applied Physics, 37 (11). 4300-4301 doi:10.1063/1.1708028
 
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