Akiyama, Morito, Kamohara, Toshihiro, Nishikubo, Keiko, Ueno, Naohiro, Nagai, Hideaki, Okutani, Takeshi (2005) Ultrahigh temperature vibration sensors using aluminum nitride thin films and W∕Ru multilayer electrodes. Applied Physics Letters, 86 (2). 22106pp. doi:10.1063/1.1850193
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Ultrahigh temperature vibration sensors using aluminum nitride thin films and W∕Ru multilayer electrodes | ||
| Journal | Applied Physics Letters | ||
| Authors | Akiyama, Morito | Author | |
| Kamohara, Toshihiro | Author | ||
| Nishikubo, Keiko | Author | ||
| Ueno, Naohiro | Author | ||
| Nagai, Hideaki | Author | ||
| Okutani, Takeshi | Author | ||
| Year | 2005 (January 10) | Volume | 86 |
| Issue | 2 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.1850193Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 8542839 | Long-form Identifier | mindat:1:5:8542839:5 |
| GUID | 0 | ||
| Full Reference | Akiyama, Morito, Kamohara, Toshihiro, Nishikubo, Keiko, Ueno, Naohiro, Nagai, Hideaki, Okutani, Takeshi (2005) Ultrahigh temperature vibration sensors using aluminum nitride thin films and W∕Ru multilayer electrodes. Applied Physics Letters, 86 (2). 22106pp. doi:10.1063/1.1850193 | ||
| Plain Text | Akiyama, Morito, Kamohara, Toshihiro, Nishikubo, Keiko, Ueno, Naohiro, Nagai, Hideaki, Okutani, Takeshi (2005) Ultrahigh temperature vibration sensors using aluminum nitride thin films and W∕Ru multilayer electrodes. Applied Physics Letters, 86 (2). 22106pp. doi:10.1063/1.1850193 | ||
| In | (2005, January) Applied Physics Letters Vol. 86 (2) AIP Publishing | ||
See Also
These are possibly similar items as determined by title/reference text matching only.
