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Akiyama, Morito, Morofuji, Yukari, Nishikubo, Keiko, Kamohara, Toshihiro (2008) Sensitivity enhancement in diaphragms made by aluminum nitride thin films prepared on polyimide films. Applied Physics Letters, 92 (4). 43509pp. doi:10.1063/1.2839319

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Reference TypeJournal (article/letter/editorial)
TitleSensitivity enhancement in diaphragms made by aluminum nitride thin films prepared on polyimide films
JournalApplied Physics Letters
AuthorsAkiyama, MoritoAuthor
Morofuji, YukariAuthor
Nishikubo, KeikoAuthor
Kamohara, ToshihiroAuthor
Year2008 (January 28)Volume92
Issue4
PublisherAIP Publishing
DOIdoi:10.1063/1.2839319Search in ResearchGate
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Mindat Ref. ID8565577Long-form Identifiermindat:1:5:8565577:7
GUID0
Full ReferenceAkiyama, Morito, Morofuji, Yukari, Nishikubo, Keiko, Kamohara, Toshihiro (2008) Sensitivity enhancement in diaphragms made by aluminum nitride thin films prepared on polyimide films. Applied Physics Letters, 92 (4). 43509pp. doi:10.1063/1.2839319
Plain TextAkiyama, Morito, Morofuji, Yukari, Nishikubo, Keiko, Kamohara, Toshihiro (2008) Sensitivity enhancement in diaphragms made by aluminum nitride thin films prepared on polyimide films. Applied Physics Letters, 92 (4). 43509pp. doi:10.1063/1.2839319
In(2008, January) Applied Physics Letters Vol. 92 (4) AIP Publishing

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Akiyama, Morito, Morofuji, Yukari, Kamohara, Toshihiro, Nishikubo, Keiko, Tsubai, Masayoshi, Fukuda, Osamu, Ueno, Naohiro (2006) Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films. Journal of Applied Physics, 100 (11). 114318pp. doi:10.1063/1.2401312
Kamohara, Toshihiro, Akiyama, Morito, Kuwano, Noriyuki (2008) Influence of polar distribution on piezoelectric response of aluminum nitride thin films. Applied Physics Letters, 92 (9). 93506pp. doi:10.1063/1.2892041
Akiyama, Morito, Kamohara, Toshihiro, Nishikubo, Keiko, Ueno, Naohiro, Nagai, Hideaki, Okutani, Takeshi (2005) Ultrahigh temperature vibration sensors using aluminum nitride thin films and W∕Ru multilayer electrodes. Applied Physics Letters, 86 (2). 22106pp. doi:10.1063/1.1850193
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Ohshima, Ichiro, Akiyama, Morito, Kakami, Akira, Tabaru, Tatsuo, Kamohara, Toshihiro, Ooishi, Yasunobu, Noma, Hiroaki (2006) Piezoelectric Response to Pressure of Aluminum Nitride Thin Films Prepared on Nickel-Based Superalloy Diaphragms. Japanese Journal of Applied Physics, 45 (6) 5169-5173 doi:10.1143/jjap.45.5169
Kamohara, Toshihiro, Akiyama, Morito, Ueno, Naohiro, Nonaka, Kazuhiro, Kuwano, Noriyuki (2006) Local epitaxial growth of aluminum nitride and molybdenum thin films in fiber texture using aluminum nitride interlayer. Applied Physics Letters, 89 (7). 71919pp. doi:10.1063/1.2337558
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Akiyama, Morito, Kamohara, Toshihiro, Kano, Kazuhiko, Teshigahara, Akihiko, Takeuchi, Yukihiro, Kawahara, Nobuaki (2009) Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering. Advanced Materials, 21. 593-596 doi:10.1002/adma.200802611
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Nagase, Toshimi, Kamohara, Toshihiro, Nishikubo, Keiko, Fukamachi, Satoru, Shobu, Kazuhisa, Akiyama, Morito (2011) Correlation between polarity distribution and piezoelectric response of solution-deposited Zn1-xLixO films. Journal of Applied Physics, 110 (11). 114120pp. doi:10.1063/1.3665636
Kamohara, Toshihiro, Akiyama, Morito, Kuwano, Noriyuki (2008) Influence of molybdenum bottom electrodes on crystal growth of aluminum nitride thin films. Journal of Crystal Growth, 310 (2). 345-350 doi:10.1016/j.jcrysgro.2007.10.033
 
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