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Chen, L. S., Bang, W. H., Park, Young-Joon, Ryan, E. Todd, King, Sean, Kim, Choong-Un (2010) Observation of space charge limited current by Cu ion drift in porous low-k/Cu interconnects. Applied Physics Letters, 96 (9). 91903pp. doi:10.1063/1.3337102

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Reference TypeJournal (article/letter/editorial)
TitleObservation of space charge limited current by Cu ion drift in porous low-k/Cu interconnects
JournalApplied Physics Letters
AuthorsChen, L. S.Author
Bang, W. H.Author
Park, Young-JoonAuthor
Ryan, E. ToddAuthor
King, SeanAuthor
Kim, Choong-UnAuthor
Year2010 (March)Volume96
Issue9
PublisherAIP Publishing
DOIdoi:10.1063/1.3337102Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8586054Long-form Identifiermindat:1:5:8586054:6
GUID0
Full ReferenceChen, L. S., Bang, W. H., Park, Young-Joon, Ryan, E. Todd, King, Sean, Kim, Choong-Un (2010) Observation of space charge limited current by Cu ion drift in porous low-k/Cu interconnects. Applied Physics Letters, 96 (9). 91903pp. doi:10.1063/1.3337102
Plain TextChen, L. S., Bang, W. H., Park, Young-Joon, Ryan, E. Todd, King, Sean, Kim, Choong-Un (2010) Observation of space charge limited current by Cu ion drift in porous low-k/Cu interconnects. Applied Physics Letters, 96 (9). 91903pp. doi:10.1063/1.3337102
In(2010, March) Applied Physics Letters Vol. 96 (9) AIP Publishing

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Zin, Emil H., Bang, W. H., Todd Ryan, E., King, Sean W., Kim, Choong-Un (2013) Study of viscoplastic deformation in porous organosilicate thin films for ultra low-k applications. Applied Physics Letters, 102 (22). 221909pp. doi:10.1063/1.4809827
Meng, D. M., Michael, N. L., Kim, Choong-Un, Park, Young-Joon (2006) Study of pore structure and stability in porous low-k interconnects using electrolyte voltammetry. Applied Physics Letters, 88 (26). 261911pp. doi:10.1063/1.2218060
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Murray, Conal E., Besser, Paul R., Ryan, E. Todd, Jordan-Sweet, Jean L. (2011) Manipulating stress in Cu/low-k dielectric nanocomposites. Applied Physics Letters, 98 (14). 141916pp. doi:10.1063/1.3578192
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