Watch the Dallas Symposium LIVE, and fundraiser auction
Ticket proceeds support mindat.org! - click here...
Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

Zin, Emil H., Bang, W. H., Todd Ryan, E., King, Sean W., Kim, Choong-Un (2013) Study of viscoplastic deformation in porous organosilicate thin films for ultra low-k applications. Applied Physics Letters, 102 (22). 221909pp. doi:10.1063/1.4809827

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleStudy of viscoplastic deformation in porous organosilicate thin films for ultra low-k applications
JournalApplied Physics Letters
AuthorsZin, Emil H.Author
Bang, W. H.Author
Todd Ryan, E.Author
King, Sean W.Author
Kim, Choong-UnAuthor
Year2013 (June 3)Volume102
Issue22
PublisherAIP Publishing
DOIdoi:10.1063/1.4809827Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8613622Long-form Identifiermindat:1:5:8613622:4
GUID0
Full ReferenceZin, Emil H., Bang, W. H., Todd Ryan, E., King, Sean W., Kim, Choong-Un (2013) Study of viscoplastic deformation in porous organosilicate thin films for ultra low-k applications. Applied Physics Letters, 102 (22). 221909pp. doi:10.1063/1.4809827
Plain TextZin, Emil H., Bang, W. H., Todd Ryan, E., King, Sean W., Kim, Choong-Un (2013) Study of viscoplastic deformation in porous organosilicate thin films for ultra low-k applications. Applied Physics Letters, 102 (22). 221909pp. doi:10.1063/1.4809827
In(2013, June) Applied Physics Letters Vol. 102 (22) AIP Publishing

See Also

These are possibly similar items as determined by title/reference text matching only.

Chen, L. S., Bang, W. H., Park, Young-Joon, Ryan, E. Todd, King, Sean, Kim, Choong-Un (2010) Observation of space charge limited current by Cu ion drift in porous low-k/Cu interconnects. Applied Physics Letters, 96 (9). 91903pp. doi:10.1063/1.3337102
Zheng, H., King, S. W., Ryan, V., Nishi, Y., Shohet, J. L. (2014) Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation. Applied Physics Letters, 104 (6). 62904pp. doi:10.1063/1.4865407
Ryan, E. Todd, Molis, Steven E. (2017) A plasmaless, photochemical etch process for porous organosilicate glass films. Journal of Applied Physics, 122 (24). 244104pp. doi:10.1063/1.5008388
Sun, Jia-Ning, Gidley, David W., Hu, Yifan, Frieze, William E., Ryan, E. Todd (2002) Depth-profiling plasma-induced densification of porous low-k thin films using positronium annihilation lifetime spectroscopy. Applied Physics Letters, 81 (8). 1447-1449 doi:10.1063/1.1501767
Lai, Y. H., He, Q. L., Cheung, W. Y., Lok, S. K., Wong, K. S., Ho, S. K., Tam, K. W., Sou, I. K. (2013) Molecular beam epitaxy-grown wurtzite MgS thin films for solar-blind ultra-violet detection. Applied Physics Letters, 102 (17). 171104pp. doi:10.1063/1.4803000
Meng, D. M., Michael, N. L., Kim, Choong-Un, Park, Young-Joon (2006) Study of pore structure and stability in porous low-k interconnects using electrolyte voltammetry. Applied Physics Letters, 88 (26). 261911pp. doi:10.1063/1.2218060
Yang, H. C., Huang, K. W., Liao, S. H., Horng, H. E., Chieh, J. J., Chen, H. H., Chen, M. J., Chen, K. L., Wang, L. M. (2013) Enhancing the tumor discrimination using antibody-activated magnetic nanoparticles in ultra-low magnetic fields. Applied Physics Letters, 102 (1). 13119pp. doi:10.1063/1.4774291
Li, W., Pei, D., Guo, X., Cheng, M. K., Lee, S., Lin, Q., King, S. W., Shohet, J. L. (2016) Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films. Applied Physics Letters, 108 (20). 202901pp. doi:10.1063/1.4950717
Kang, S., Yoon, Y., Kim, J., Kim, W. (2013) Thermoelastic response of thin metal films and their adjacent materials. Applied Physics Letters, 102 (2). 21908pp. doi:10.1063/1.4776701
Kim, Taek-Soo, Chumakov, Dmytro, Zschech, Ehrenfried, Dauskardt, Reinhold H. (2009) Tailoring UV cure depth profiles for optimal mechanical properties of organosilicate thin films. Applied Physics Letters, 95 (7). 71902pp. doi:10.1063/1.3190198
Zheng, H., Ryan, E. T., Nishi, Y., Shohet, J. L. (2014) Effect of vacuum-ultraviolet irradiation on the dielectric constant of low-k organosilicate dielectrics. Applied Physics Letters, 105 (20). 202902pp. doi:10.1063/1.4901742
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are Β© OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: August 20, 2025 20:42:11
Go to top of page