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Desgardin, P., Barthe, M.-F., Ntsoenzok, E., Liu, C.-L. (2006) Modifications of He implantation induced cavities in silicon by MeV silicon implantation. Applied Surface Science, 252. 3231-3236 doi:10.1016/j.apsusc.2005.08.080

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Reference TypeJournal (article/letter/editorial)
TitleModifications of He implantation induced cavities in silicon by MeV silicon implantation
JournalApplied Surface Science
AuthorsDesgardin, P.Author
Barthe, M.-F.Author
Ntsoenzok, E.Author
Liu, C.-L.Author
Year2006 (February)Volume252
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2005.08.080Search in ResearchGate
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Mindat Ref. ID9909250Long-form Identifiermindat:1:5:9909250:4
GUID0
Full ReferenceDesgardin, P., Barthe, M.-F., Ntsoenzok, E., Liu, C.-L. (2006) Modifications of He implantation induced cavities in silicon by MeV silicon implantation. Applied Surface Science, 252. 3231-3236 doi:10.1016/j.apsusc.2005.08.080
Plain TextDesgardin, P., Barthe, M.-F., Ntsoenzok, E., Liu, C.-L. (2006) Modifications of He implantation induced cavities in silicon by MeV silicon implantation. Applied Surface Science, 252. 3231-3236 doi:10.1016/j.apsusc.2005.08.080
In(n.d.) Applied Surface Science Vol. 252. Elsevier BV

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