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Phan, Duy-Thach, Chung, Gwiy-Sang (2011) The effect of geometry and post-annealing on surface acoustic wave characteristics of AlN thin films prepared by magnetron sputtering. Applied Surface Science, 257. 8696-8701 doi:10.1016/j.apsusc.2011.05.050

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Reference TypeJournal (article/letter/editorial)
TitleThe effect of geometry and post-annealing on surface acoustic wave characteristics of AlN thin films prepared by magnetron sputtering
JournalApplied Surface Science
AuthorsPhan, Duy-ThachAuthor
Chung, Gwiy-SangAuthor
Year2011 (August)Volume257
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2011.05.050Search in ResearchGate
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Mindat Ref. ID9916437Long-form Identifiermindat:1:5:9916437:9
GUID0
Full ReferencePhan, Duy-Thach, Chung, Gwiy-Sang (2011) The effect of geometry and post-annealing on surface acoustic wave characteristics of AlN thin films prepared by magnetron sputtering. Applied Surface Science, 257. 8696-8701 doi:10.1016/j.apsusc.2011.05.050
Plain TextPhan, Duy-Thach, Chung, Gwiy-Sang (2011) The effect of geometry and post-annealing on surface acoustic wave characteristics of AlN thin films prepared by magnetron sputtering. Applied Surface Science, 257. 8696-8701 doi:10.1016/j.apsusc.2011.05.050
In(n.d.) Applied Surface Science Vol. 257. Elsevier BV

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