Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

Qu, Minghui, Niu, Xinhuan, Hou, Ziyang, Yan, Han, Luo, Fu (2023) Effect of hydroxy carboxylates as complexing agent on improving chemical mechanical polishing performance of M-plane sapphire and action mechanism analysis. Ceramics International, 49 (6) 9622-9631 doi:10.1016/j.ceramint.2022.11.132

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleEffect of hydroxy carboxylates as complexing agent on improving chemical mechanical polishing performance of M-plane sapphire and action mechanism analysis
JournalCeramics International
AuthorsQu, MinghuiAuthor
Niu, XinhuanAuthor
Hou, ZiyangAuthor
Yan, HanAuthor
Luo, FuAuthor
Year2023 (March)Volume49
Issue6
PublisherElsevier BV
DOIdoi:10.1016/j.ceramint.2022.11.132Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID15703022Long-form Identifiermindat:1:5:15703022:0
GUID0
Full ReferenceQu, Minghui, Niu, Xinhuan, Hou, Ziyang, Yan, Han, Luo, Fu (2023) Effect of hydroxy carboxylates as complexing agent on improving chemical mechanical polishing performance of M-plane sapphire and action mechanism analysis. Ceramics International, 49 (6) 9622-9631 doi:10.1016/j.ceramint.2022.11.132
Plain TextQu, Minghui, Niu, Xinhuan, Hou, Ziyang, Yan, Han, Luo, Fu (2023) Effect of hydroxy carboxylates as complexing agent on improving chemical mechanical polishing performance of M-plane sapphire and action mechanism analysis. Ceramics International, 49 (6) 9622-9631 doi:10.1016/j.ceramint.2022.11.132
In(2023, March) Ceramics International Vol. 49 (6) Elsevier BV

See Also

These are possibly similar items as determined by title/reference text matching only.

Zou, Yida, Niu, Xinhuan, Zhan, Ni, Liu, Jianghao, Li, Xinjie, He, Chao, Dong, Changxin, Zhou, Jianwei (2024) Effect of amino acid complexing agents on chemical mechanical polishing performance and action mechanism of C-plane sapphire: Combining experiments and theoretical calculations. Materials Chemistry and Physics, 316. 129066 doi:10.1016/j.matchemphys.2024.129066
Liu, Jianghao, Niu, Xinhuan, Zhan, Ni, Zou, Yida, Yan, Han, Qu, Minghui, Luo, Fu, Shi, Yunhui, Zhou, Jianwei (2023) Inhibition Effect and Mechanism of 2-Mercaptopyrimidine on Cobalt-Based Copper Interconnects Chemical Mechanical Polishing: Combined Experimental and DFT Study. Journal of The Electrochemical Society, 170 (10) 101501 doi:10.1149/1945-7111/ad0077
Yin, Da, Niu, Xinhuan, Zhang, Kai, Wang, Jianchao, Cui, Yaqi (2018) Preparation of MgO doped colloidal SiO2 abrasive and their chemical mechanical polishing performance on c-, r- and a-plane sapphire substrate. Ceramics International, 44. 14631-14637 doi:10.1016/j.ceramint.2018.05.087
Zhang, Wei, Lei, Hong, Liu, Wenqing, Zhang, Zefang (2023) Effect of the carboxyl group number of the complexing agent on polishing performance of alumina slurry in sapphire CMP. Ceramics International, 49 (9) 13687-13697 doi:10.1016/j.ceramint.2022.12.246
Zhou, Jiakai, Niu, Xinhuan, Yang, Chenghui, Huo, Zhaoqing, Lu, Yanan, Wang, Zhi, Cui, Yaqi, Wang, Ru (2020) Surface action mechanism and planarization effect of sarcosine as an auxiliary complexing agent in copper film chemical mechanical polishing. Applied Surface Science, 529. 147109pp. doi:10.1016/j.apsusc.2020.147109
Ke, Congming, Liu, Shoulin, Pang, Yiao, Wei, Yongping, Wu, Yaping, Luo, Qiufa, Wu, Yueqin, Lu, Jing (2024) Synergistic effect of abrasive friction and glycine on improving chemical mechanical polishing performance of single-crystal GaN substrate. Ceramics International, 50 (12) 21357-21366 doi:10.1016/j.ceramint.2024.03.247
Zhou, Jiakai, Niu, Xinhuan, Cui, Yaqi, Wang, Zhi, Wang, Jianchao, Wang, Ru (2020) Study on the film forming mechanism, corrosion inhibition effect and synergistic action of two different inhibitors on copper surface chemical mechanical polishing for GLSI. Applied Surface Science, 505. 144507pp. doi:10.1016/j.apsusc.2019.144507
Ma, Xinran, Xiu, Ziyang, Xu, Yan, Yan, Jiuchun (2023) Ultrasonic-assisted soldering of sapphire through metallic transition layers of Al and Zn using Sn-xZn-2Al solder alloys. Ceramics International, 49 (2) 2451-2460 doi:10.1016/j.ceramint.2022.09.218
Zhou, Chen, Xu, Xiangyang, Dai, Lei, Gong, Haiming, Lin, Shuntian (2021) Chemical-mechanical polishing performance of core-shell structured polystyrene@ceria/nanodiamond ternary abrasives on sapphire wafer. Ceramics International, 47 (22) 31691-31701 doi:10.1016/j.ceramint.2021.08.048
Liu, Guoqi, Li, Hongxia, Zheng, Han, Qian, Fan, Ma, Weikui, Yang, Wengang (2023) Mechanism of in-situ formation of spinel and its effect on the mechanical properties of Al2O3–C refractories. Ceramics International, 49 (6) 9231-9238 doi:10.1016/j.ceramint.2022.11.087
Chen, Yang, Zhong, Luning, Chen, Ailian, Fu, Meng, Lu, Xiaowang (2023) Highly dispersed Gd-CeO2 nanocrystals supported on mesoporous silica composite particles towards photochemical (photo-assisted chemical) mechanical polishing. Ceramics International, 49 (11) 16932-16943 doi:10.1016/j.ceramint.2023.02.055
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are Β© OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: August 26, 2025 19:47:00
Go to top of page