Zou, Yida, Niu, Xinhuan, Zhan, Ni, Liu, Jianghao, Li, Xinjie, He, Chao, Dong, Changxin, Zhou, Jianwei (2024) Effect of amino acid complexing agents on chemical mechanical polishing performance and action mechanism of C-plane sapphire: Combining experiments and theoretical calculations. Materials Chemistry and Physics, 316. 129066 doi:10.1016/j.matchemphys.2024.129066
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Effect of amino acid complexing agents on chemical mechanical polishing performance and action mechanism of C-plane sapphire: Combining experiments and theoretical calculations | ||
Journal | Materials Chemistry and Physics | ||
Authors | Zou, Yida | Author | |
Niu, Xinhuan | Author | ||
Zhan, Ni | Author | ||
Liu, Jianghao | Author | ||
Li, Xinjie | Author | ||
He, Chao | Author | ||
Dong, Changxin | Author | ||
Zhou, Jianwei | Author | ||
Year | 2024 (April) | Volume | 316 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/j.matchemphys.2024.129066Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 17180552 | Long-form Identifier | mindat:1:5:17180552:1 |
GUID | 0 | ||
Full Reference | Zou, Yida, Niu, Xinhuan, Zhan, Ni, Liu, Jianghao, Li, Xinjie, He, Chao, Dong, Changxin, Zhou, Jianwei (2024) Effect of amino acid complexing agents on chemical mechanical polishing performance and action mechanism of C-plane sapphire: Combining experiments and theoretical calculations. Materials Chemistry and Physics, 316. 129066 doi:10.1016/j.matchemphys.2024.129066 | ||
Plain Text | Zou, Yida, Niu, Xinhuan, Zhan, Ni, Liu, Jianghao, Li, Xinjie, He, Chao, Dong, Changxin, Zhou, Jianwei (2024) Effect of amino acid complexing agents on chemical mechanical polishing performance and action mechanism of C-plane sapphire: Combining experiments and theoretical calculations. Materials Chemistry and Physics, 316. 129066 doi:10.1016/j.matchemphys.2024.129066 | ||
In | (2024) Materials Chemistry and Physics Vol. 316. Elsevier BV |
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