Vote for your favorite mineral in #MinCup25! - Stibnite vs. Okenite
It's a battle of dark and light as soft, dramatic stibnite goes up against adorable cottonballs of Okenite.
Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

McOmber, Janice I., Nair, Rajesh S. (1991) Development of a process to achieve residue-free photoresist removal after high-dose ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 281-286 doi:10.1016/0168-583x(91)96178-n

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleDevelopment of a process to achieve residue-free photoresist removal after high-dose ion implantation
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsMcOmber, Janice I.Author
Nair, Rajesh S.Author
Year1991 (April)Volume55
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(91)96178-nSearch in ResearchGate
Generate Citation Formats
Mindat Ref. ID5596323Long-form Identifiermindat:1:5:5596323:5
GUID0
Full ReferenceMcOmber, Janice I., Nair, Rajesh S. (1991) Development of a process to achieve residue-free photoresist removal after high-dose ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 281-286 doi:10.1016/0168-583x(91)96178-n
Plain TextMcOmber, Janice I., Nair, Rajesh S. (1991) Development of a process to achieve residue-free photoresist removal after high-dose ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 281-286 doi:10.1016/0168-583x(91)96178-n
In(1991, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 55 (1) Elsevier BV

See Also

These are possibly similar items as determined by title/reference text matching only.

Taylor, Michael, Hurley, Kurt, Lee, King, LeMere, Mark, Opsal, Jon, O'Brien, Tim (1991) Thermal-wave measurements of high-dose ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 725-729 doi:10.1016/0168-583x(91)96266-n
Guenzel, R. (1991) Improved dose uniformity by utilizing the beam profile in the ion implantation process. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 58 (2). 294-295 doi:10.1016/0168-583x(91)95606-e
Hill, Chris, Hunt, Peter (1991) Ion implantation in bipolar technology. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 1-8 doi:10.1016/0168-583x(91)96125-5
Cheung, Nathan W. (1991) Plasma immersion ion implantation for ULSI processing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 811-820 doi:10.1016/0168-583x(91)96285-s
Rauschenbach, B. (1991) Direct observation of crystalline to amorphous transition by ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 58 (2). 283-286 doi:10.1016/0168-583x(91)95603-b
Vyatkin, A.F., Simonov, V.V., Kholopkin, A.I. (1991) Development of ion implantation equipment in the USSR. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 386-392 doi:10.1016/0168-583x(91)96199-u
Holmes, A.J.T., Proudfoot, G. (1991) Negative-ion sources for ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 323-327 doi:10.1016/0168-583x(91)96186-o
Treglio, J.R. (1989) High dose metal ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 40. 567-570 doi:10.1016/0168-583x(89)91047-1
Marou, F., Claverie, A., Salles, Ph., Martinez, A. (1991) The enhanced diffusion of boron in silicon after high-dose implantation and during rapid thermal annealing. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 655-660 doi:10.1016/0168-583x(91)96252-g
Bausells, J., Badenes, G., Lora-Tamayo, E. (1991) Calculation of channeling effects in ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 666-670 doi:10.1016/0168-583x(91)96254-i
Chater, R.J., Kilner, J.A., Reeson, K.J., Robinson, A.K., Hemment, P.L.F. (1991) High-dose oxygen implantation into silica. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 686-690 doi:10.1016/0168-583x(91)96258-m
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are Β© OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: September 2, 2025 21:39:58
Go to top of page