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Tien, Chuen-Lin (2008) Influence of ejection angle on residual stress and optical properties of sputtering Ta2O5 thin films. Applied Surface Science, 255. 2890-2895 doi:10.1016/j.apsusc.2008.08.049

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Reference TypeJournal (article/letter/editorial)
TitleInfluence of ejection angle on residual stress and optical properties of sputtering Ta2O5 thin films
JournalApplied Surface Science
AuthorsTien, Chuen-LinAuthor
Year2008 (December)Volume255
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2008.08.049Search in ResearchGate
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Mindat Ref. ID9913824Long-form Identifiermindat:1:5:9913824:0
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Full ReferenceTien, Chuen-Lin (2008) Influence of ejection angle on residual stress and optical properties of sputtering Ta2O5 thin films. Applied Surface Science, 255. 2890-2895 doi:10.1016/j.apsusc.2008.08.049
Plain TextTien, Chuen-Lin (2008) Influence of ejection angle on residual stress and optical properties of sputtering Ta2O5 thin films. Applied Surface Science, 255. 2890-2895 doi:10.1016/j.apsusc.2008.08.049
In(n.d.) Applied Surface Science Vol. 255. Elsevier BV

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Tien, Chuen-Lin (2010) Effect of sputtering anisotropic ejection on the optical properties and residual stress of Nb2O5 thin films. Applied Surface Science, 257. 481-486 doi:10.1016/j.apsusc.2010.07.017
Tien, Chuen-Lin, Yu, Kuo-Chang, Tsai, Tsung-Yo, Liu, Ming-Chung (2015) Effect of RF power on the optical, electrical, mechanical and structural properties of sputtering Ga-doped ZnO thin films. Applied Surface Science, 354. 79-84 doi:10.1016/j.apsusc.2015.02.154
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Lee, Cheng-Chung, Tien, Chuen-Lin, Hsu, Jin-Cherng (2002) Internal stress and optical properties of Nb_2O_5 thin films deposited by ion-beam sputtering. Applied Optics, 41. 2043pp. doi:10.1364/ao.41.002043
Tien, Chuen-Lin; Chiang, Chun-Yu; Wang, Yi-Lin; Wang, Ching-Chiun; Lin, Shih-Chin (2025) Surface Roughness, Residual Stress, and Optical and Structural Properties of Evaporated VO2 Thin Films Prepared with Different Tungsten Doping Amounts. Applied Sciences, 15 (17). doi:10.3390/app15179457
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Jiang, Minhong, Liu, Xinyu (2008) Structural, electrical and optical properties of Al–Ti codoped ZnO (ZATO) thin films prepared by RF magnetron sputtering. Applied Surface Science, 255. 3175-3178 doi:10.1016/j.apsusc.2008.09.012
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