Tien, Chuen-Lin (2010) Effect of sputtering anisotropic ejection on the optical properties and residual stress of Nb2O5 thin films. Applied Surface Science, 257. 481-486 doi:10.1016/j.apsusc.2010.07.017
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Effect of sputtering anisotropic ejection on the optical properties and residual stress of Nb2O5 thin films | ||
Journal | Applied Surface Science | ||
Authors | Tien, Chuen-Lin | Author | |
Year | 2010 (November) | Volume | 257 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/j.apsusc.2010.07.017Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 9916338 | Long-form Identifier | mindat:1:5:9916338:9 |
GUID | 0 | ||
Full Reference | Tien, Chuen-Lin (2010) Effect of sputtering anisotropic ejection on the optical properties and residual stress of Nb2O5 thin films. Applied Surface Science, 257. 481-486 doi:10.1016/j.apsusc.2010.07.017 | ||
Plain Text | Tien, Chuen-Lin (2010) Effect of sputtering anisotropic ejection on the optical properties and residual stress of Nb2O5 thin films. Applied Surface Science, 257. 481-486 doi:10.1016/j.apsusc.2010.07.017 | ||
In | (n.d.) Applied Surface Science Vol. 257. Elsevier BV |
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