Pan, Tung-Ming, Huang, Chun-Chin (2010) Effects of oxygen content and postdeposition annealing on the physical and electrical properties of thin Sm2O3 gate dielectrics. Applied Surface Science, 256. 7186-7193 doi:10.1016/j.apsusc.2010.05.048
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Effects of oxygen content and postdeposition annealing on the physical and electrical properties of thin Sm2O3 gate dielectrics | ||
Journal | Applied Surface Science | ||
Authors | Pan, Tung-Ming | Author | |
Huang, Chun-Chin | Author | ||
Year | 2010 (September) | Volume | 256 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/j.apsusc.2010.05.048Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 9915063 | Long-form Identifier | mindat:1:5:9915063:1 |
GUID | 0 | ||
Full Reference | Pan, Tung-Ming, Huang, Chun-Chin (2010) Effects of oxygen content and postdeposition annealing on the physical and electrical properties of thin Sm2O3 gate dielectrics. Applied Surface Science, 256. 7186-7193 doi:10.1016/j.apsusc.2010.05.048 | ||
Plain Text | Pan, Tung-Ming, Huang, Chun-Chin (2010) Effects of oxygen content and postdeposition annealing on the physical and electrical properties of thin Sm2O3 gate dielectrics. Applied Surface Science, 256. 7186-7193 doi:10.1016/j.apsusc.2010.05.048 | ||
In | (n.d.) Applied Surface Science Vol. 256. Elsevier BV |
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