Komatsu, Naoyoshi, Tanaka, Hirotaka, Aoki, Hidemitsu, Masumoto, Keiko, Honjo, Masatomo, Kimura, Chiharu, Okumura, Yukihiko, Sugino, Takashi (2010) Effect of nitrogen doping on the properties of AlSiO film for wide bandgap semiconductors. Applied Surface Science, 257. 1437-1440 doi:10.1016/j.apsusc.2010.08.063
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Effect of nitrogen doping on the properties of AlSiO film for wide bandgap semiconductors | ||
| Journal | Applied Surface Science | ||
| Authors | Komatsu, Naoyoshi | Author | |
| Tanaka, Hirotaka | Author | ||
| Aoki, Hidemitsu | Author | ||
| Masumoto, Keiko | Author | ||
| Honjo, Masatomo | Author | ||
| Kimura, Chiharu | Author | ||
| Okumura, Yukihiko | Author | ||
| Sugino, Takashi | Author | ||
| Year | 2010 (December) | Volume | 257 |
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/j.apsusc.2010.08.063Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 9916923 | Long-form Identifier | mindat:1:5:9916923:1 |
| GUID | 0 | ||
| Full Reference | Komatsu, Naoyoshi, Tanaka, Hirotaka, Aoki, Hidemitsu, Masumoto, Keiko, Honjo, Masatomo, Kimura, Chiharu, Okumura, Yukihiko, Sugino, Takashi (2010) Effect of nitrogen doping on the properties of AlSiO film for wide bandgap semiconductors. Applied Surface Science, 257. 1437-1440 doi:10.1016/j.apsusc.2010.08.063 | ||
| Plain Text | Komatsu, Naoyoshi, Tanaka, Hirotaka, Aoki, Hidemitsu, Masumoto, Keiko, Honjo, Masatomo, Kimura, Chiharu, Okumura, Yukihiko, Sugino, Takashi (2010) Effect of nitrogen doping on the properties of AlSiO film for wide bandgap semiconductors. Applied Surface Science, 257. 1437-1440 doi:10.1016/j.apsusc.2010.08.063 | ||
| In | (n.d.) Applied Surface Science Vol. 257. Elsevier BV | ||
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