Levesque, A., Bouteville, A. (2001) Investigation of the tantalum chlorination with hydrogen chloride for LPCVD tantalum elaboration. Le Journal de Physique IV, 11. doi:10.1051/jp4:20013113
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Investigation of the tantalum chlorination with hydrogen chloride for LPCVD tantalum elaboration | ||
Journal | Le Journal de Physique IV | ||
Authors | Levesque, A. | Author | |
Bouteville, A. | Author | ||
Year | 2001 (August) | Volume | 11 |
Publisher | EDP Sciences | ||
DOI | doi:10.1051/jp4:20013113Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 10302020 | Long-form Identifier | mindat:1:5:10302020:6 |
GUID | 0 | ||
Full Reference | Levesque, A., Bouteville, A. (2001) Investigation of the tantalum chlorination with hydrogen chloride for LPCVD tantalum elaboration. Le Journal de Physique IV, 11. doi:10.1051/jp4:20013113 | ||
Plain Text | Levesque, A., Bouteville, A. (2001) Investigation of the tantalum chlorination with hydrogen chloride for LPCVD tantalum elaboration. Le Journal de Physique IV, 11. doi:10.1051/jp4:20013113 | ||
In | (n.d.) Le Journal de Physique IV Vol. 11. EDP Sciences |
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